基于RGO-TiO_(2)纳米材料的湿度传感器  

Humidity sensor based on RGO-TiO_(2) nanomaterial

作　　者：赵薇 尹崇山 邹望辉 ZHAO Wei;YIN Chongshan;ZOU Wanghui(School of Physics and Electronics,Changsha University of Science and Technology,Changsha 410114,China)

机构地区：[1]长沙理工大学物理与电子科学学院,湖南长沙410114

出　　处：《传感器与微系统》2024年第6期24-27,共4页Transducer and Microsystem Technologies

基　　金：国家自然科学基金资助项目(12105027);湖南省教育厅科学研究项目(23A0260)。

摘　　要：采用水热合成法制备感湿材料并在印有微型叉指电极的表面分别涂覆二氧化钛(TiO_(2))和还原氧化石墨烯(RGO)-TiO_(2)纳米薄膜来构建湿敏元件,敏感材料的形貌和结构用场发射扫描电子显微镜(FESEM)和X射线衍射仪(XRD)进行表征,测量薄膜各电学参数随湿度的变化,并分析其阻抗特性。结果表明:在室温下,加入0.2%RGO的TiO_(2)复合材料灵敏度高达0.135 MΩ/%RH,且湿滞相对较小,湿度传感器的响应时间为50 s、恢复时间为76 s。多次测量结果显示,传感器具有良好的重复性和稳定性。Humidity-sensitive material is prepared using hydrothermal synthesis methods.TiO_(2) and RGO-TiO_(2) nanofilms are coated on surfaces imprinted with micro-interdigited electrodes to construct humidity-sensitive element.The morphology and structure of the sensitive material are characterized by field emission scanning electron microscopy(FESEM)and X-ray diffractometer(XRD).Various electrical parameters variation of the film are measured with humidity,and their impedance characteristics are analyzed.The results show that at room temperature,the sensitivity of TiO_(2) composite material with 0.2%RGO is as high as 0.135 MΩ/%RH,and the hysteresis is relatively small.The response time of the humidity sensor is 50 s,and the recovery time is 76 s.Multiple measurement results show that the sensor has good repeatability and stability.

关 键 词：湿度传感器 二氧化钛 还原氧化石墨烯 湿敏材料 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]