1 mm圆柱形压电微驱动器的有限元分析与设计  

FEA and design of 1 mm cylindrical piezoelectric micro-actuator

作　　者：刘周龙 周铄 朱强国 郑友成 王光庆[1] LIU Zhoulong;ZHOU Shuo;ZHU Qiangguo;ZHENG Youcheng;WANG Guangqing(School of Information and Electronic Engineering(Sussex Artificial Intelligence Institute),Zhejiang Gongshang University,Hangzhou 310018,China)

机构地区：[1]浙江工商大学信息与电子工程学院(萨塞克斯人工智能学院),浙江杭州310018

出　　处：《传感器与微系统》2024年第6期73-76,共4页Transducer and Microsystem Technologies

摘　　要：研究设计了一种直径为1 mm、长度为5 mm的压电微驱动器,拟用于光学相干层析成像(OCT)内窥镜样机驱动与控制。利用有限元分析(FEA)软件对定子进行有限元建模和仿真,研究了材料参数和结构尺寸对定子振动特性和模态频率的影响。研究结果表明:微型驱动器定子的一阶弯曲振动频率为21 kHz。定子谐振频率随定子长度的增加急剧降低,随陶瓷厚度的增大而增大;粘接剂的材料特性与厚度对定子的模态频率影响不大,但对定子的振动特性有较大影响。当激励电压为100 V时,频率为21 kHz,驱动器空载转速达到400 r/min,堵转力矩为2.5 mN·m,基本满足OCT内窥镜应用要求。A piezoelectric micro-actuator with diameter of 1 mm and length of 5 mm is developed to drive and control the prototype of optical coherence tomography(OCT)endoscope.The stator is modeled and simulated by finite element analysis(FEA)software and the effects of material parameters and structural dimensions on the stator vibration characteristics and modal frequency are studied.The research results show that the first order bending vibration frequency of the micro actuator stator is 21 kHz,the resonant frequency of the stator decreases sharply with the increase of the length of the stator and increases with the increase of the thickness of the ceramic.In addition,the material properties and thickness of the bonding layer have little influence on the modal frequency,but have a great influence on the vibration characteristics of stator.When the excitation voltage is 100 V and frequency is 21 kHz,the no-load speed of the micro actuator reaches 400 r/min,and the stall torque is 2.5 mN·m.It basicly meets the application requirements of OCT endoscope.

关 键 词：振动特性 有限元模型 一体化定子 粘接层 

分 类 号：TH128[机械工程—机械设计及理论] TM38[电气工程—电机]