集成电路制造行业大气环境影响评价技术分析  

作　　者：田昕竹 王岩 丁淮剑 

机构地区：[1]北京市生态环境评估与投诉中心,北京100161 [2]中国电子工程设计院有限公司,北京100840

出　　处：《科技风》2024年第15期77-79,共3页

摘　　要：集成电路产业发展迅速,产业规模大幅提升,在落实“简政放权、放管结合、优化服务”的大背景下,推动北京市集成电路项目环境影响评价文件编制、技术评估和审批管理工作的高效开展十分重要。由于集成电路生产过程工艺复杂,会产生多种有毒有害气体,因此做好集成电路项目大气环境影响评价是防控项目污染、保障项目环保可行的重要前提。本文针对集成电路制造项目,结合北京市具体情况,对集成电路制造工业大气环境影响评价技术要点和未来需关注的问题进行了概述和建议。The integrated circuit industry is developing rapidly,and the scale of the industry has increased significantly.In the context of the implementation of decentralization,decentralization and optimization of services,it is important to promote the efficient preparation of environmental impact assessment documents,technical assessment and approval management of integrated circuit projects in Beijing.Integrated circuit production process is complex and can produce a variety of toxic and harmful gases.Therefore,a good environmental impact assessment of the air of integrated circuit projects is an important prerequisite to prevent and control pollution and ensure the environmental feasibility of the projects.The article outlines and suggests the technical points and future issues to be concerned about the atmospheric environmental impact assessment of integrated circuit manufacturing industry for integrated circuit manufacturing projects and with the specific situation of Beijing.

关 键 词：集成电路 环境影响评价 大气污染物 废气处理 

分 类 号：X82[环境科学与工程—环境工程]