标准真空电馈通微型磁控管真空计及其性能研究  

Micro Magnetron Vacuum Gauge for Standard Vacuum Feedthrough and Performance

作　　者：朱冠卿 邹鹏飞 毕海林 王旭迪[1] 谢斌平 董金奎 曹青 ZHU Guanqing;ZOU Pengfei;BI Hailin;WANG Xudi;XIE Binping;DONG Jinkui;CAO Qing(School of Mechanical Engineering,Hefei University of Technology,Hefei 230009,China;Fermion instruments(Shanghai)Co.,Ltd.,Shanghai 201906,China)

机构地区：[1]合肥工业大学机械工程学院,合肥230009 [2]费勉仪器科技(上海)有限公司,上海201906

出　　处：《真空科学与技术学报》2024年第5期394-400,共7页Chinese Journal of Vacuum Science and Technology

基　　金：国家重点研发计划项目(2023YFF0717200);国家自然科学基金青年基金项目(62101172)。

摘　　要：目前冷阴极电离真空计在微型真空系统中的应用较少,文章对一种磁控管真空计(MMG)进行研究,成功达到了微小尺寸与高真空测量水平同时满足的目标,该MMG体积仅有0.3 cm^(3),比目前市售的磁控管真空计小30倍以上,同时由于其连接器设计使其能够与标准真空电馈通相适配。用COMSOL模拟了磁控管真空计内部电磁场分布与电子运动轨迹,实验测试得到了MMG在−500~−2500 V电压下10^(−4)~10^(−7)mbar之间的电流与真空度关系曲线,选取最适合MMG测量的电压进行重复测量并拟合得到其灵敏度,将拟合得到的数据与校准真空计测量数据对比得到MMG误差范围。该MMG可用于微型真空系统中10^(−4)到10^(−7)mbar范围真空度的测量。The current application of cold cathode ionization vacuum gauges in micro-vacuum systems is relatively limited.In this study,research of magnetron gauge(MMG)was conducted,which successfully achieved the goals of small size and high vacuum measurement.The volume of this MMG is only 0.3 cm^(3),more than 30 times smaller than currently available magnetron gauges on the market.Additionally,its connector design allows it to be compatible with standard vacuum feedthroughs.The internal electromagnetic field and electron trajectory within the vacuum gauge were modeled.The current versus pressure curves of MMG among 10^(−4)~10^(−7)mbar at−500~−2500 V were obtained from the experimental tests.The most suitable voltage for MMG measurement was selected for repeated measurements and fitted to obtain its sensitivity,and the error range of MMG was obtained by comparing the fitted data with the measured data of the calibrated vacuum gauge.The results show that this MMG can accurately measure the pressure of 10^(−4)~10^(−7)mbar in micro-vacuum system.

关 键 词：真空测量 磁控管真空计 微型化 

分 类 号：TB772[一般工业技术—真空技术]