基于磁透镜结构参数的电子枪磁聚焦特性分析  

Characterization of Magnetic Focusing of Electron Gun Based on Structural Parameters of Magnetic Lens

作　　者：常家玮 李胜波 林志树 白凤民 李国政 白宗征 CHANG Jiawei;LI Shengbo;LIN Zhishu;BAI Fengmin;LI Guozheng;BAI Zongzheng(School of Mechanical and Automotive Engineering,Xiamen University of Technology,Xiamen 361024,China;Hebei Zhicheng High Energy Beam Technology Co.,Ltd.,Langfang 065399,China)

机构地区：[1]厦门理工学院机械与汽车工程学院,厦门361024 [2]河北志成束源科技有限公司,廊坊065399

出　　处：《真空科学与技术学报》2024年第5期463-469,共7页Chinese Journal of Vacuum Science and Technology

基　　金：校企合作项目:高压电子束焊机室外动枪真空室开发(ZK-HX23031)。

摘　　要：磁透镜是电子枪的重要组成部分,其结构会影响磁聚焦性能,从而影响束斑直径与电子束焊接质量。文章以国产ZD-VEBW系列高压电子束焊接设备电子枪为研究对象,构建电子枪束源与电磁聚焦结构的物理模型,并借助CST平台,仿真分析了球差影响下的束斑形貌和不同聚焦电流下磁透镜铁壳内径、铁壳开口对束斑直径的影响。设计环形挡板实现了磁透镜铁壳内径、铁壳开口参数的调整,并进行聚焦电流变化下的焊接实验研究。实验结果表明:磁透镜结构参数的合理设计可以达到更优的磁聚焦特性、更小束斑直径与更大的焊缝深宽比,实验验证了仿真结果的正确性,文章的研究对国产ZD-VEBW系列高压电子枪磁透镜结构的设计和该系列电子枪焊接质量的提升提供了理论和实验指导。The magnetic lens,as a key component of the electron gun,greatly influences focusing performance,spot diameter,and welding quality through its structure.A physical model of the electron gun beam source and electromagnetic focusing structure is constructed based on the ZD-VEBW series high-voltage electron beam welding equipment.Utilizing the CST platform,simulations and analyses are performed to understand the effects of the inner diameter of the magnetic lenses'iron shells and the iron shell openings on the spot diameter.The ring baffle design facilitates adjustments to the inner diameter of the magnetic lens iron shell and the iron shell opening parameters.Welding experiments are conducted with varying focusing currents.These experiments show that optimal magnetic focusing characteristics,resulting in the smallest beam spot diameter and the largest weld depth-to-width ratio,can be achieved through a reasonable design of the magnetic lens structure parameters.The simulation results are validated by these experiments.

关 键 词：电子枪 磁聚焦系统 聚焦电流 焊缝深宽比 束斑直径 

分 类 号：TG439.3[金属学及工艺—焊接]