UV/O_(3)工艺处理电子工业TMAH废水  

UV/O3 Process for Treating Wastewater Containing TMAH from Electronics Industry

作　　者：张立成[1] 冯锴 刘澈 张志磊[1] ZHANG Li‑cheng;FENG Kai;LIU Che;ZHANG Zhi‑lei(School of Municipal and Environmental Engineering,Shenyang Jianzhu University,Shenyang 110168,China;S.Y.Technology,Engineering and Construction Co.Ltd.,Beijing 100142,China)

机构地区：[1]沈阳建筑大学市政与环境工程学院,辽宁沈阳110168 [2]世源科技工程有限公司,北京100142

出　　处：《中国给水排水》2024年第9期63-68,共6页China Water & Wastewater

摘　　要：为了解决电子工业四甲基氢氧化铵(TMAH)废水难以生物降解的问题,分析了紫外/臭氧(UV/O_(3))高级氧化工艺处理TMAH废水的可行性,并基于Box-Behnken响应曲面法评价了反应时间、O_(3)初始浓度、pH等因素对UV/O_(3)工艺处理TMAH废水的影响。结果表明,在TMAH初始浓度为250 mg/L、O_(3)初始浓度为8.1 mg/L、pH为12.5、反应时间为60 min的条件下,UV/O_(3)工艺能够有效降解TMAH废水。优化试验条件后,TMAH废水中N元素的无机化率最大达到了53.5%,表明有53.5%的TMAH被降解为氨氮和硝态氮,与模型给出的54.8%比较接近。通过对响应曲面的分析,得出影响因素显著性的大小关系为反应时间>O_(3)初始浓度>pH。This paper analyzed the feasibility of ultraviolet/ozone(UV/O_(3))advanced oxidation process for treating wastewater containing tetramethylammonium hydroxide(TMAH),and investigated the effects of reaction time,initial O_(3)concentration and pH on the treatment performance of the UV/O_(3)process based on Box‑Behnken response surface method,so as to solve the problem that TMAH wastewater is difficult to biodegrade.When initial concentration of TMAH was 250 mg/L,initial concentration of O_(3)was 8.1 mg/L,pH was 12.5 and reaction time was 60 min,the UV/O_(3)process effectively degraded TMAH in the wastewater.After optimising the test conditions,the maximum inorganic rate of N element in the TMAH wastewater reached 53.5%,indicating that 53.5%of TMAH was degraded to ammonia nitrogen and nitrate nitrogen,which was close to 54.8%predicted by the model.The analysis of the response surface indicated that the significance of influencing factors in descending order was reaction time,initial O_(3)concentration and pH.

关 键 词：高级氧化 紫外/臭氧 四甲基氢氧化铵 响应曲面法 

分 类 号：TU992[建筑科学—市政工程]