B_(4)C&H-DLC薄膜在过氧化氢溶液中的摩擦学行为研究  

Tribological Behavior of B_(4)C&H-DLC Films in Hydrogen Peroxide Solution

作　　者：朱国菁 李文波 曹学乾 尚伦霖 孔令刚 张广安[1] ZHU Guojing;LI Wenbo;CAO Xueqian;SHANG Lunlin;KONG Linggang;ZHANG Guangan(State Key Laboratory of Solid Lubrication,Lanzhou Institute of Chemical Physics,Chinese Academy of Sciences,Gansu Lanzhou 730000,China;Key Lab of Opt-Electronic Technology and Intelligent Control of Minisitry of Education,Lanzhou Jiaotong University,Gansu Lanzhou 730070,China)

机构地区：[1]中国科学院兰州化学物理研究所固体润滑国家重点实验室,甘肃兰州730000 [2]兰州交通大学光电技术与智能控制教育部重点实验室,甘肃兰州730070

出　　处：《摩擦学学报（中英文）》2024年第4期562-572,共11页Tribology

基　　金：甘肃省科技重大专项项目(22ZD6GA002);甘肃省青年科技基金计划(21JR7RA089);中国科学院兰州化学物理研究所“一三五”重大突破项目(KJZLZD-3)。

摘　　要：采用闭合场非平衡磁控溅射技术在316L不锈钢表面沉积硼、氢掺杂类金刚石碳(B_(4)C&H-DLC)薄膜,利用扫描电镜(SEM)、Raman、X射线光电子能谱仪(XPS)、纳米压痕和线性往复摩擦试验机等系统分析了B_(4)C&H-DLC薄膜的结构、力学性能及过氧化氢水溶液中与不同对偶球的摩擦学行为.结果表明:B_(4)C&H-DLC薄膜在过氧化氢环境中与Al_(2)O_(3)球相对摩擦时,有严重的磨粒磨损行为,摩擦系数与磨损率较高.此外,B_(4)C&H-DLC薄膜在过氧化氢环境中与Si_(3)N_(4)和SiC球相对摩擦时发生了复杂的摩擦化学反应,形成了硅胶和硼酸的摩擦化学产物,发挥了减摩抗磨作用[磨损率较低分别为0.8×10^(-7)和1.0×10^(-7)mm^(3)/(N·m)].因此,本研究为碳基薄膜在氧化条件下摩擦副的合理设计和应用提供了试验依据,同时也为保护在苛刻环境工作的机械部件提供了1种可行方法.In both industry and daily life,hydrogen peroxide is frequently used.When used in the oxidizing environment of hydrogen peroxide,ceramic and stainless steel parts are vulnerable to excessive wear or premature failure.Al_(2)O_(3)does not react with diamond-like carbon sheets during friction because of its stable characteristics.Increasing its friction chemical components is one of the most efficient ways to further reduce the friction coefficient and wear rate.According to studies,the interaction between Si_(3)N_(4)and SiC balls generated lubricating chemical substances that reduced friction.In order to investigate the influence of Si elements in the friction process with diamond-like carbon-based films in a hydrogen peroxide environment,SiC and Si_(3)N_(4)balls were chosen as dual balls.As a consequence,silicon wafers and 316L stainless steel had been covered with boron and hydrogen-doped diamond-like carbon(B_(4)C&H-DLC)thin films using a closed-field unbalanced magnetron sputtering approach.Using a ball-and-disk linear reciprocating friction tester,the tribological characteristics of three distinct dual balls(Al_(2)O_(3),Si_(3)N_(4),and SiC)with B_(4)C&DLC thin films in a hydrogen peroxide environment had been compared.Through the use of SEM,Raman,XPS,nanoindentation,and three-dimensional profilometer methods of testing,the structural and mechanical characteristics of the B_(4)C&DLC films as well as the changes in the chemical composition and structure of the films before and after friction were also investigated.The mechanisms of B_(4)C&DLC films'wear and friction when rubbing on Si_(3)N_(4)and SiC were emphasized.The results of this study demonstrated that the B_(4)C&DLC films,when compared to pure DLC,had superior mechanical properties,with hardness and elastic modulus values of 30.6 and 263.0 GPa,respectively.When friction was applied on Al_(2)O_(3)spheres with dual balls in a hydrogen peroxide the environment,the B_(4)C&DLC films exhibited a severe abrasive wear behavior resulting from the greater Hertz pr

关 键 词：类金刚石碳 摩擦配副 双氧水 硅氧化合物 元素掺杂 

分 类 号：TH117.1[机械工程—机械设计及理论]