大规模集成光学微腔传感研究进展(特邀)  

Research Progress of Large-scale Integrated Optical Microcavities for Sensing(Invited)

作　　者：孙博姝 孙春雷 唐仁杰 王艺婷 李兰 SUN Boshu;SUN Chunlei;TANG Renjie;WANG Yiting;LI Lan(School of Engineering,Westlake University,Hangzhou 310030,China)

机构地区：[1]西湖大学工学院,杭州310030

出　　处：《光子学报》2024年第5期23-38,共16页Acta Photonica Sinica

基　　金：国家自然科学基金(No.62175202);西湖光电研究院重点项目(No.2023GD003/110500Y0022303);西湖光电芯片研究专项支持计划(No.10300000H062401/001)。

摘　　要：近年来,集成光学微腔因其高灵敏度、高拓展性和高集成度在传感领域得到了广泛应用。利用低成本的互补金属氧化物半导体(CMOS)兼容的微纳加工工艺,集成光学微腔在实现大规模制备的小型化传感系统中具有显著潜力。然而,实现大规模传感阵列系统仍然面临着诸多挑战,包括传感通量不足、全集成难度大、封装和测试成本高等。这些挑战主要是由传感器的系统架构复杂、光谱利用率低、加工工艺成本高等各种因素导致。本文旨在阐述常见阵列传感架构设计、集成光学谐振微腔传感器基本单元(主要包括微环、缺陷型光子晶体以及Fabry-Pérot型光子晶体谐振腔结构)及其传感阵列应用工作的研究进展。此外,还探讨了传感阵列系统的可拓展性和优化方案,并对其未来的发展方向进行了展望。Sensors have been widely applied in various fields,such as environmental monitoring,biomedical engineering,and food safety.However,in recent years,there has been a growing demand for miniaturized sensing equipment or systems that can be used in portable or wearable applications.These application scenarios have imposed new requirements on sensing device size,weight,power consumption,and integration levels.Highly integrated sensing systems primarily rely on measuring changes in electrical or optical parameters.Compared with electrical sensors,optical sensors possess the advantages of immunity to external electromagnetic interference,stability,and label-free sensing capability.Fiber optic sensors are the most mature optical sensing method,known for their high sensitivity and low cost.However,they are constrained by their relatively large device size and the challenges associated with micro/nanofabrication,making it difficult to achieve high spatial density sensing arrays.Similarly,Surface Plasmon Resonance(SPR)sensors offer high sensitivity but require spatial optical coupling,resulting in a lower level of integration as sensing equipment.However,a compact integrated optical sensing device provides numerous benefits.It combines the advantages of optical sensing with low processing costs and high integration capabilities due to its compatibility with CMOS-compatible processes.Furthermore,by cascading multiple integrated photonic devices in an array,multi-site and multi-parameter sensing capability can be achieved with exceptional spatial resolution on a large scale,significantly enhancing the efficiency and functionality of the sensing system.Based on the method of light coupling to the optical sensors,the architecture for realizing multichannel sensing arrays can be categorized into three types:mechanical scanning,spectroscopic scanning,and wavelength division multiplexing.Mechanical scanning approaches necessitate large dimensions of sensing systems and result in low operational efficiency.Spectroscopic methods red

关 键 词：集成光学器件 传感器 光子晶体波导 谐振腔 光子晶体 

分 类 号：TN256[电子电信—物理电子学]