微波谐振腔放电击穿特性与发射光谱分析  

Microwave Resonant Cavity Discharge Breakdown Characterization and Emission Spectral Analysis

作　　者：杨兆伦 陈泽煜 彭玉彬 贺永宁[3] 崔万照 YANG Zhaolun;CHEN Zeyu;PENG Yubin;HE Yongning;CUI Wanzhao(College of Aeronautics,Nanjing University of Aeronautics and Astronautics,Nanjing 211106,China;National Key Laboratory of Science and Technology on Space Microwave,China Academy of Space Technology(Xi'an),Xi'an 710100,China;School of Microelectronics,Xi'an Jiaotong University,Xi'an 710100,China)

机构地区：[1]南京航空航天大学航天学院,南京211106 [2]中国空间技术研究院西安分院空间微波技术重点实验室,西安710100 [3]西安交通大学微电子学院,西安710100

出　　处：《光子学报》2024年第5期199-206,共8页Acta Photonica Sinica

基　　金：国家自然科学基金(No.61901361)。

摘　　要：针对航天器通信系统中微波部件放电过程中的检测问题,开展对微波部件放电击穿的实验研究,以特殊设计的微波谐振腔为对象,研究从微放电到低气压放电的过渡过程中击穿特性的变化,考虑三种背景气体类型,采用全局检测和光学局部检测相结合的方式进行测试。结果发现,在100~1000 Pa的压强范围内,放电的击穿阈值均呈现先减小后增大的趋势,背景气体为氮气和空气,击穿阈值在400~500 Pa时达到最低水平,放电发生时产生的发射光谱较为相似,较为明显的发射谱线强度出现在氮气的第二正带系337.1 nm处。此外,由于背景环境中含少量的水蒸气,在314 nm处的OH自由基强度也较为明显。分析得出气体压强可改变粒子生成与消耗路径并对等离子体中各粒子的浓度大小产生影响。而氧气环境下的最低击穿阈值在600~700 Pa,同时整体发射光谱强度较低,仅能观测到704.2 nm和777.5 nm处氧原子的跃迁,进一步分析OH对氧气放电过程的影响,经过水浴处理后再次进行氧气的测试过程,结果并没有出现显著变化,表明在一定的压强范围内,水分子的存在对氧气的电离过程产生影响较小。Recently,there has been a significant increase in the power density of microwave components in spacecraft communication systems due to their development towards high power and miniaturization.This has raised the risk of radio frequency breakdown,which poses a challenge to the safe functioning of these systems.This paper conducts an experimental study on the discharge breakdown of microwave components in order to address the issue of detection during the discharge process.This study uses a specially designed microwave resonant cavity with air,nitrogen and oxygen as background gases.Using the global detection by signal nulling and local means by emission spectroscopy,the changes in breakdown characteristics from multipactor to low-pressure gas discharges are investigated.The results show that the breakdown thresholds of the discharges show a tendency to decrease and then increase in the pressure range of 100~1000 Pa,which is in line with the typical variation of“Paschen's law”.When the background gases are nitrogen and air,the breakdown threshold reaches the lowest level at 400~500 Pa,with the lowest values of 31.8 dBm and 30.9 dBm,respectively.And the lowest value of 31.3 dBm at 600~700 Pa in the oxygen environment.Under the same dimensions and working conditions,the breakdown level depends on the input power and the difficulty of ionizing the gap gases.In the left half-branch of the curve,the breakdown power decreases continuously,due to the lower pressure,the number of gas molecules in the interstitial space is less,the chance of collision during the movement of the electrons is smaller,the mechanism to maintain the discharge is mainly caused by the multiplication of secondary electrons after scattering of the electrons with the inner wall material,which belongs to the category of multipactor,and it is mainly determined by the surface properties of the inner wall and the input power together.While in the right halfbranch of the curve,with the gradual increase in pressure,the level of breakdown depends on the

关 键 词：射频击穿 发射光谱 气体放电 空间微波部件 等离子体 

分 类 号：TL65[核科学技术—核技术及应用]