微起爆序列用硅基作动机构隔断特性研究  

Research on the Blocking Character of the Silicon Actuator Using in the MEMS Pyrotechnics

作　　者：胡腾江 赵玉龙[1] 谭明 何亚新 刘运斌 屈萍 HU Teng-jiang;ZHAO Yu-ong;TAN Ming;HE Ya-xin;LIU Yun-bin;QU Ping(State Key Laboratory for Manufacturing System Engineering,Xi’an Jiaotong University,Xi’an,710049;Technical Center,Sichuan Huachuan Industries Co.Ltd.,Chengdu,610100;Shaanxi Applied Physics and Chemistry Research Institute,Xi’an,710061)

机构地区：[1]西安交通大学精密微纳制造技术全国重点实验室,陕西西安710049 [2]四川华川工业股份有限公司技术中心,四川成都610100 [3]陕西应用物理化学研究所,陕西西安710061

出　　处：《火工品》2024年第3期1-6,共6页Initiators & Pyrotechnics

基　　金：国家自然科学基金资助项目(52105585);中国兵器装备集团基金项目(EJ20-4019)。

摘　　要：针对MEMS火工品的内置安全控制设计需求,在硅基MEMS作动机构的基础上,重点开展了硅基作动机构与微起爆传爆序列的集成化设计与能量匹配研究。该序列主要由微起爆器、微作动机构及传爆药组成。其中微起爆器的叠氮化铜装药尺寸为Ф0.8mm×0.8mm,装药量为1.5mg;微作动机构在11V直流电压驱动下,可以实现传爆通道的开启与闭合,隔断位移为743.06µm;传爆药为油墨直写方式制备的CL-20传爆药,装药尺寸为Ф3mm×3mm,装药密度为1.66g/cm^(3),装药量约为35mg。研究表明该序列具备可靠起爆、传爆以及隔爆功能。In response to the technological needs of internal safety control of MEMS pyrotechnic devices,the integrated design and energy matching research of silicon-based MEMS actuators and micro detonation transmission sequences was focused based on silicon-based MEMS actuators.The sequence is mainly constituted by micro initiator,micro actuator and booster.The size of the copper azide charge for the micro initiator isФ0.8 mm×0.8 mm,with a charge mass of 1.5 mg;under the driving of 11V DC voltage,the micro actuator can achieve the opening and closing of the detonation channel,with a partition displacement of 743.06µm;the CL-20 booster explosive is prepared by ink direct writing method,with a charge size ofФ3 mm×3 mm,a charge density of 1.66 g/cm^(3) and a charge mass of approximately 35 mg.The study show that the sequence has reliable initiation,detonation transmission,and explosion-proof functions.

关 键 词：微起爆传爆序列 微起爆器 微作动机构 传爆药 

分 类 号：TJ450.2[兵器科学与技术—火炮、自动武器与弹药工程]