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作 者:邓正亮 王亚军[1] 何鹏飞 刘瑞华 甘强[1] 冯长根[1] DENG Zheng-iang;WANG Ya-jun;HE Peng-fei;LIU Rui-hua;GAN Qiang;FENG Chang-gen(School of Mechatronical Engineering,Beijing Institute of Technology,Beijing,100081)
出 处:《火工品》2024年第3期7-13,共7页Initiators & Pyrotechnics
基 金:国家自然科学基金(No.22275018)。
摘 要:为将纳米Al/MnO_(2)亚稳态分子间复合物(Metastable intermolecular composite,MIC)薄膜应用于微机电系统,采用水热法制备了MnO_(2)纳米棒和MnO_(2)纳米线,采用电泳沉积技术(Electrophoretic deposition,EPD)制备了纳米Al/MnO_(2)MIC薄膜,对其结构、微观形貌以及热性能进行表征分析,并开展不同悬浮液浓度及电场强度下Al/MnO_(2)MIC薄膜的沉积动力学研究。结果表明:沉积的MIC膜均匀致密,无明显裂纹;纳米Al在薄膜中处于过剩状态;Al/MnO_(2)纳米棒薄膜的放热量高于Al/MnO_(2)纳米线。在沉积电压(或悬浮液浓度)不变的情况下,沉积质量与沉积时间呈抛物线关系,Al/MnO_(2)纳米棒的沉积效率高于Al/MnO_(2)纳米线。研究表明EPD法是制备纳米Al/MnO_(2)MIC薄膜的理想方法,具有应用于微机电系统领域的潜力。In order to apply nano-Al/MnO_(2) metastable intermolecular composite(MIC)films to micro-electro-mechanical systems(MEMS),MnO_(2)-nanorod and MnO_(2)-nanowire were successfully prepared by a hydrothermal method,and nano-Al/MnO_(2) MIC films were fabricated by an electrophoretic deposition(EPD)process.The structure,morphology and thermal property of the nano-Al/MnO_(2) MIC films were characterized and analyzed,and the deposition kinetics of nano-Al/MnO_(2) MIC films were studied under different deposition voltage or suspension concentration.The results show that the deposited MIC film is uniform and dense without obvious cracks;Nano-Al is in a surplus state in the as-prepared film;The heat release of Al/MnO_(2)-nanorod MIC film is higher than that of Al/MnO_(2)-nanowire.With the deposition voltage(or suspension concentration)unchanged,there is a parabolic relationship between deposition mass and deposition time,and Al/MnO_(2)-nanorod has a higher deposition efficiency than Al/MnO_(2)-nanowire.The study indicates the EPD method is promising for the preparation of nano-Al/MnO_(2) MIC films,and is applicable to the field of MEMS.
关 键 词:亚稳态分子间复合物 含能薄膜 电泳沉积 沉积动力学 热性能
分 类 号:TJ55[兵器科学与技术—军事化学与烟火技术]
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