多通道抗串扰式光谱共焦位移测量方法  

Multi-channel Anti-crosstalk Spectral Confocal Displacement Measurement Method

作　　者：孙振国 李加福 罗明哲 李轶凡 胡佳成 SUN Zhenguo;LI Jiafu;LUO Mingzhe;LI Yifan;HU Jiacheng(College of Metrology&Measurement Engineering,China Jiliang University,Hangzhou,Zhejiang 310018,China;National Institute of Metrology,Beijing 100029,China)

机构地区：[1]中国计量大学计量测试工程学院,浙江杭州310018 [2]中国计量科学研究院,北京100029

出　　处：《计量学报》2024年第4期489-495,共7页Acta Metrologica Sinica

基　　金：国家自然科学基金(52205579);国家市场监管总局能力建设(ANL2207)。

摘　　要：提出一种位移测量方法,解决扫描光谱共焦测量系统存在不同共焦点之间的相互干扰问题。通过光纤束保持多个测量通道之间的独立性,并利用光开关切换测量通道来防止干扰。该系统的7个共焦点构成一个等边六边形,其中6个点分别位于六边形的各顶点处,1个共焦点位于六边形的中心,六边形的边长为43.27μm。通过位移测量实验得出,位移测量系统各测量通道的绝对误差小于0.15μm,范围为0~90μm。在测量台阶高度的实验中,2个高度差为30μm的台阶面,误差最大者为0.16μm;在球径测量实验中,无需移动测量系统或被测物体便可完成7路通道的测量;通过对数据进行拟合得到半径为5 mm的球体近似值,最大误差为80.92μm。对比传统方法,该方法展现了较高的精度和分辨率。Propose a displacement measurement method to address the issue of mutual interference between different confocal points in a scanning spectral confocal measurement system.Maintain the independence between multiple measurement channels by using optical fiber bundles and employ optical switches to switch between measurement channels to prevent interference.The system comprises seven focal points arranged in an equilateral hexagon,with six points positioned at the hexagon s vertices and one focal point at its center,yielding a hexagon side length of 43.27μm.Displacement measurement experiments indicate an absolute error of less than 0.15μm across all measurement channels and a range of 0~90μm.In experiments involving step surfaces,with two steps of 30μm height difference,the maximum error is 0.16μm.In sphere radius measurements,all seven channels can measure without the need to move the measurement system or the object being measured.A fitted approximation for a sphere with a radius of 5 mm yields a maximum error of 80.92μm.Compared with traditional methods,this method shows higher precision and resolution.

关 键 词：几何量测量 光谱共焦 多通道 位移测量 共焦位移 

分 类 号：TB921[一般工业技术—计量学]