基于红外激光积分球的硅探测器响应非线性研究  

Research on Nonlinear Response of Silicon Detectors Based onInfrared Laser Integrating Sphere

作　　者：王炳凯 宦克为[1] 安保林 赵云龙 董伟[2] 李益文[3] WANG Bingkai;HUAN Kewei;AN Baolin;ZHAO Yunlong;DONG Wei;LI Yiwen(Changchun University of Science and Technology,Changchun,Jilin 130022,China;National Institute of Metrology,Beijing 100029,China;Air Force Engineering University,Xi′an,Shaanxi 710051,China)

机构地区：[1]长春理工大学,吉林长春130022 [2]中国计量科学研究院,北京100029 [3]空军工程大学,陕西西安710051

出　　处：《计量学报》2024年第4期508-513,共6页Acta Metrologica Sinica

基　　金：国家重点研发计划(2022YFF0610804);国家科技重大专项(J2019-V-0008-0102-003);吉林省科技发展计划项目(20210101158JC);中央级公益性科研项目(AKYYJ2202);陕西省自然科学基础研究计划(J2019-V-0008-0102)。

摘　　要：0.9μm是我国高温标准光电和辐射法热力学温度测量的主要工作波段之一,因此对该波段下滤光片辐射计的非线性的研究十分重要。基于单相干光源双光路的光通量倍增法设计并搭建了硅探测器光谱响应非线性测量系统,利用双紫外熔融石英分光镜实现光通量的调控,通过积分球使探测器视场被完全充满,提高入射光在探测器光敏面作用区域的重复性,采用高吸收光阱避免光通量调控过程中的多次反射。实验通过切换中性密度滤波片来实现对光电流范围扩展,表征了0.9μm滤光片辐射计在1.6×10-8~8×10-6 A光电流范围内的非线性,单次测量的非线性值为-8.7×10-5~4.8×10-5,单次测量结果标准不确定度优于3.7×10-4,累积测量的非线性值为-2.7×10-4,标准不确定度优于7.6×10-4。0.9μm is one of the main working bands of the high temperature standard photoelectric and radiation thermodynamic temperature measurement in our country,so it is xery important to study the nonlinearity of the filter radiometer in this band.A nonlinear measurement system for spectral response of silicon detector was designed and built based on the flux multiplication method of single-phase dry light source double optical path.The flux was regulated by double-violet external fused quartz spectroscope,and the detector field of view was completely filled by integrating sphere to improve the repeatability of incident light in the photosensitive area of the detector.The high absorption light trap was used to avoid multiple reflections during flux regulation.The experiment extends the photocurrent range by switching the neutral density filter,and characterizes the nonlinearity of the 0.9μm filter radiometer in the photocurrent range 1.6×10-8~8×10-6 A.The nonlinear value of single measurement is-8.7×10-5~4.8×10-5,the standard uncertainty of single measurement is better than 3.7×10-4,the nonlinear value of cumulative measurement is-2.7×10-4,and the standard uncertainty is better than 7.6×10-4.

关 键 词：温度测量 光谱响应 光阱 非线性 光电探测器 滤光片辐射计 光通量倍增法 

分 类 号：TB942[一般工业技术—计量学]