基于萨哈-玻尔兹曼图与自吸收校正的单点修正激光诱导击穿光谱  

One‐point calibration LIBS based on Saha‐Boltzmann plot and self‐absorption correction

作　　者：胡桢麟 王天泽 郭连波 林楠 HU Zhenlin;WANG Tianze;GUO Lianbo;LIN Nan(Shanghai Institute of Optics and Fine Mechanics,Chinese Academy of Sciences,Shanghai 201800,China;Wuhan National Laboratory for Optoelectronics,Huazhong University of Science and Technology,Wuhan 430074,China)

机构地区：[1]中国科学院上海光学精密机械研究所强场激光物理国家重点实验室,上海201800 [2]华中科技大学武汉光电国家研究中心,湖北武汉430074

出　　处：《量子电子学报》2024年第3期455-462,共8页Chinese Journal of Quantum Electronics

基　　金：国家自然科学基金(62075069,62375101);国家重点研发计划(2023YFF0714905);中国博士后科学基金第74批面上资助项目(2023M743643);国家资助博士后研究人员计划(GZB20230791)。

摘　　要：为进一步提高单点修正激光诱导击穿光谱(OPC-LIBS)的定量分析精度,提出了基于萨哈-玻尔兹曼图与自吸收校正的OPC-LIBS方法,利用该方法对两个钛合金样品中的Ti、V和Al元素进行了定量分析,并将其定量结果与基于玻尔兹曼图的OPC-LIBS、基于萨哈-玻尔兹曼图的OPC-LIBS以及基于玻尔兹曼图和自吸收校正的OPC-LIBS的结果进行了对比分析。研究结果表明,所提出的改进方法在4种方法中可获得最小的定量误差,测量两个钛合金样品中3种元素的平均相对误差(MREs)分别为4.11%和3.99%,证明所提出的改进方法可有效提高OPC-LIBS的定量分析精度。To further improve the quantitative analysis accuracy of one-point calibration laser-induced breakdown spectroscopy(OPC-LIBS),the OPC-LIBS based on Saha-Boltzmann plot and self-absorption correction was proposed.Ti,V and Al in two titanium alloy samples were quantified using the method,and the quantitative results were compared with those of OPC-LIBS based on Boltzmann plot,OPC-LIBS based on Saha-Boltzmann plot,and OPC-LIBS based on Boltzmann plot and self-absorption correction.The results show that the proposed method can obtain the smallest quantitative error among the four methods,with mean relative errors(MREs)of 4.11%and 3.99%for the three elements in two titanium alloy samples,respectively,indicating that the proposed method can effectively improve the quantitative analysis accuracy of OPC-LIBS.

关 键 词：光谱学 单点修正激光诱导击穿光谱 萨哈-玻尔兹曼图 自吸收校正 等离子体温度 

分 类 号：O433.4[机械工程—光学工程]