基于微纳光纤结型谐振腔的低频水声传感器  

Low Frequency Hydroacoustic Sensor Based on Micro-Nanofiber Knot Resonant Cavity

作　　者：翟小平 崔建功[1] 张文栋[1] 黄浩铭 张国军[1] Zhai Xiaoping;Cui Jiangong;Zhang Wendong;Huang Haoming;Zhang Guojun(State Key Laboratory of Dynamic Measurement Technology,North University of China,Taiyuan 030051,China)

机构地区：[1]中北大学省部共建动态测试技术国家重点实验室,太原030051

出　　处：《微纳电子技术》2024年第6期83-89,共7页Micronanoelectronic Technology

基　　金：国家自然科学基金项目(62274149,52175553,62205308);山西省发展项目基础研究计划项目(202103021224203,20210302123027,202103021223202)。

摘　　要：通过将谐振腔置入有利于将声压变化有效传导到谐振腔的材料中,可以实现基于光学微纳结型谐振腔的水声传感器。提出了一种基于微纳光纤技术的结型谐振腔水声传感器,其尺寸更小,对于低频信号有出色的探测能力。将直径为3.5μm的光学微纳纤维制备成曲率半径为550μm的结型谐振腔,采用聚二甲基硅氧烷(PDMS)薄膜将其以上、下包裹的形式封装到镂空玻璃基底上,完成水声传感器的制备。PDMS具有比SiO_(2)低的折射率,并表现出良好的传输性能。采用PDMS封装谐振腔提高了传感器的品质因数(1.45×10^(4)),也有利于在水下更好地保护谐振腔。采用滤波放大技术来解调接收到的声信号,测试结果表明,该传感器在12.5~100 Hz内的灵敏度均值为-148.6 dB,信噪比均值为40 dB。Hydroacoustic sensor based on optical micro-nanoknot resonant cavity can be realized by placing the resonant cavity into materials that facilitates effective conduction of sound pressure changes into the resonant cavity.A knot resonant cavity hydroacoustic sensor based on micronanofiber optic technology was proposed,which had a smaller size and excellent detection capability for low frequency signals.A knot resonant cavity with a radius of curvature of 550μm was prepared using optical micro-nanofiber with a diameter of 3.5μm,then it was wrapped around and packaged onto a hollow glass substrate by using a polydimethylsiloxane(PDMS)film to complete the fabrication of the hydroacoustic sensor.PDMS has a lower reflectivity than SiO_(2)and exhibits good transmission properties.The use of PDMS to encapsulate the resonant cavity improves the quality factor of the transducer(1.45×10^(4))and also facilitates better protection of the resonant cavity underwater.The filter amplification technique was used to demodulate the received sound signal.The test results show that the sensor has an average sensitivity of-148.6 dB and an average signal-to-noise ratio of 40 dB at 12.5-100 Hz.

关 键 词：水听器 低频信号 结型谐振腔 灵敏度 信噪比 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]