基于拼接技术的大量程绝对式直线时栅位移传感器自校准方法研究  

Research on self-calibration method of large range absolute linear time-grating displacement sensor based on splicing technology

作　　者：黄猛 樊星辰[1,2,3] 陈磊 王中行 HUANG Meng;FAN Xingchen;CHEN Lei;WANG Zhongxing(Engineering Research Center of Mechanical Testing Technology and Equipment,Ministry of Education,Chongqing University of Technology,Chongqing 400054,China;Chongqing Key Laboratory of Time-Grating Sensing and Advanced Testing Technology,Chongqing University of Technology,Chongqing 400054,China;Genertec Guoce Time Grating,Chongqing 400041,China)

机构地区：[1]重庆理工大学机械检测与装备技术教育部工程研究中心,重庆400054 [2]时栅传感及先进检测技术重庆市重点实验室,重庆400054 [3]通用技术集团国测时栅科技有限公司,重庆400041

出　　处：《重庆理工大学学报（自然科学）》2024年第5期303-311,共9页Journal of Chongqing University of Technology：Natural Science

基　　金：重庆市教育委员会科学技术研究项目(KJQN202301131)。

摘　　要：针对大量程直线位移传感器扩展测量范围和实现绝对定位互相矛盾的问题,在其应用场合缺乏高效安装高精度参考器件的条件,导致难以频繁在线校准以保持其测量精度,基于拼接技术提出一种适用于直线时栅位移传感器的误差延拓自校准新方法。,将复杂的大量程绝对式测量拆分为单段栅尺上的绝对位移测量和栅尺拼接后的绝对位置判断;将绝对位置数据作为位置判断依据并构建双测头结构,实现接缝处感应信号的平滑过渡;利用原生的双测头结构获得定距测量序列,结合误差延拓法构建周期误差函数,再使用快速傅里叶变换获得测量序列幅度谱重构误差函数。为了验证上述方法的可行性和有效性,制作了单段栅尺长度为600 mm的传感器样机进行实验。结果表明,2段栅尺拼接后在量程903 mm内能够实现绝对位置测量;采用自校准方法后传感器单周期内平均误差峰值从2.00μm降至0.59μm,误差补偿效果为70.50%;大量程误差峰值从18.93μm降至0.75μm,误差补偿效果为96.04%;此外,通过校准效果对比实验证明了误差延拓自校准方法优于基于傅里叶谐波补偿的比较校准法,误差校准效果提升约76.20%。With the contradiction between extended measuring range and absolute positioning of large range linear displacement sensor,and a lack of efficient installation of high-precision reference devices in its application field,it is difficult to frequently calibrate online to maintain its measurement accuracy.This paper proposes a new error continuation self-calibration method for linear time-grating displacement sensor based on splicing technology.First,the complex large range absolute measurement is divided into the absolute displacement measurement on a single grid scale and the absolute position judgment after the grid scale is spliced.Then,the absolute position data is employed as the basis of position judgment and the double probe structure is built to realize the smooth transition of the induced signal at the joint.Finally,the original two-probe structure is employed to obtain the range measurement sequence,the periodic error function is built with the error continuation method,and the amplitude spectrum reconstruction error function is obtained by the fast Fourier transform method.To verify the feasibility and effectiveness of the above method,a sensor prototype with a single segment grid ruler length of 600 mm is made for experiment.Our results show the absolute position measurement is realized within the measuring range of 903 mm after the two grid scales are splicing together.After the self-calibration method is adopted,the average peaking error of the sensor in a single cycle decreases from 2.00μm to 0.59μm,and the error compensation effect is 70.50%.The peak value of large-range error decreases from 18.93μm to 0.75μm,and the error compensation effect is 96.04%.Moreover,the calibration effect comparison experiment demonstrates our self-calibration method is superior to the traditional comparison calibration method based on Fourier harmonic compensation,and the error calibration effect is improved by about 76.20%.Our research may provide some references for range expansion and error self-calibration for

关 键 词：大量程 绝对式 位移传感器 误差校准 时栅 

分 类 号：TH7[机械工程—仪器科学与技术]