微乳突提高低力学刺激下微结构柔性压力传感器的性能  

Improving Performance of Microstructured Flexible Pressure Sensor under Low Mechanical Stimulation by Micro-papillae

作　　者：赵家浩 黄汉雄[1] ZHAO Jiahao;HUANG Hanxiong(Guangdong Provincial Key Laboratory of Technique and Equipment for Macromolecular Advanced Manufacturing,South China University of Technology,Guangzhou 510640)

机构地区：[1]华南理工大学广东省高分子先进制造技术及装备重点实验室,广州510640

出　　处：《机械工程学报》2024年第4期222-229,共8页Journal of Mechanical Engineering

基　　金：广东省自然科学基金(2023A1515010793);国家自然科学基金(52073096)资助项目。

摘　　要：提出一种新的快速制备双级微圆顶阵列柔性压力传感器的方案,并应用于检测微弱的生理信号。采用模压成型,快速制备表面分布有双级、单级微圆顶阵列和表面平整的热塑性聚氨酯柔性薄片;将喷金的微结构薄片和涂覆导电石墨的平整薄片作为传感基片,以面对面方式封装成柔性压阻式压力传感器。结果表明,与单级微结构传感器相比,微圆顶表面上分布有微乳突的双级微结构传感器(D-Sensor)在线性低压区(0~11kPa)具有较高的灵敏度(0.061kPa^(-1))和明显较高的线性度(线性相关判定系数达0.996)。这归因于在压力作用下双级微圆顶的形变遵循Archard理论,接触区面积随压力提高的增加量较大。D-Sensor的响应时间较短(100 ms),在1000次循环压缩/释放测试(9 kPa压力)中能保持较稳定的压阻响应。D-Sensor可准确地检测脉搏、发音和呼吸等生理信号(对应低力学刺激)。研究表明,所提出的快速方法制备的双级微结构传感器具有优良的传感性能,可应用于健康检测领域。A novel approach is proposed to rapidly prepare dual-level microstructured flexible pressure sensors with micro-papillae,which are applied in weak physiological signals detection.The flexible thermoplastic polyurethane sheets with the dual-level and single-level microdomes array and the flat surface are rapidly prepared by using compression molding.Then the gold-sprayed microstructured sheet and the graphite-coated flat sheet are assembled into flexible piezoresistive pressure sensors face-to-face.It is demonstrated that the dual-level microstructured pressure sensor(D-Sensor)with micro-papillae distributed on the surface of microdomes exhibits a higher sensitivity(0.061 kPa^(-1))and obviously higher linearity(with a linear correlation coefficient of upto 0.996)in linear low-pressure region(0~11 kPa)than the pressure sensor with the single-level microdomes array.This is attributed to the fact that the deformation of the dual-level microdomes under pressure obeys the Archard theory,and the area of the contact regions is increased largely with raising pressure.The D-Sensor has a short response time(100 ms)and maintains a stable piezoresistive response during 1000 cycles of cyclic compression/release tests(under 9 kPa pressure).The D-Sensor can accurately monitor some physiological signals corresponding to weakly mechanical stimulation,such as wrist pulse,pronunciation,and respiration.The results demonstrate that the dual-level microstructured sensors fabricated by the proposed rapid approach has high sensing performance and so can be applied in health detection field.

关 键 词：柔性压力传感器 微圆顶阵列 微形变 热塑性聚氨酯 模压成型 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]