激光织构形状间距对单晶硅摩擦磨损特性的影响  

Effect of Laser Texture Shape Spacing on Friction and Wear Characteristics of Monocrystalline Silicon

作　　者：周意皓 陈文刚[1,2] 程家豪 郭思良 魏北朝 袁浩恩 Dongyang Li ZHOU Yihao;CHEN Wengang;CHENG Jiahao;GUO Siliang;WEI Beichao;YUAN Haoen;Dongyang Li(College of Mechanical and Transportation,Southwest Forestry University,Kunming 650224,China;Academician Dongyang Li Workstation in Yunnan Province,Kunming 650224,China;Department of Chemical and Materials Engineering,University of Alberta,Alberta Edmonton T6G 2H5,Canada)

机构地区：[1]西南林业大学机械与交通学院,昆明650224 [2]云南省Dongyang Li院士工作站,昆明650224 [3]阿尔伯塔大学化学与材料工程系,加拿大阿尔伯塔埃德蒙顿T6G 2H5

出　　处：《表面技术》2024年第11期127-139,共13页Surface Technology

基　　金：云南省Dongyang Li院士工作站项目(202305AF150019);国家自然科学基金(51865053);云南省教育厅科学研究基金(2023Y076,2023Y0760)。

摘　　要：目的提高单晶硅的减摩耐磨性能。方法利用紫外激光在单晶硅试样表面刻蚀不同形状,间距为0.1、0.2、0.3 mm,宽度为0.2 mm的织构。基于MRTR-1摩擦磨损实验机,研究干摩擦条件下织构参数对单晶硅摩擦学性能的影响。利用光学显微镜和扫描电子显微镜(SEM)观察单晶硅表面织构的微观形貌和磨痕形貌,用电子天平称量实验前后试样的质量,并计算磨损率,通过Ansys有限元软件模拟仿真试样表面应力和摩擦生热的温度分布。结果与无织构相比,刻蚀表面织构均能不同程度地降低试样的磨损率,磨损率从0.012 mm^(3)/(N·m)降至0.008 mm^(3)/(N·m);部分表面织构试样的摩擦因数下降,低于0.14;单晶硅试样的磨损机制主要为磨粒磨损和黏着磨损。仿真结果表明,织构试样的平均等效应力均大于无织构试样,在单晶硅试样表面加工织构会影响其表面整体性,容易出现应力集中现象;织构试样表面高于环境温度的区域面积小于无织构试样,且试样表面的最高温度与摩擦因数呈正相关。结论在单晶硅表面加工织构,可以有效提高试样的耐磨性能,合适的织构参数还能够降低摩擦因数。通过加工表面织构,一方面可以影响试样的整体性,另一方面能够改善试样的散热性能。The primary objective of this research is to enhance the friction and wear resistance of single-crystal silicon materials,which hold significant importance in various technological applications.However,the practical use of single-crystal silicon is limited due to its susceptibility to wear,prompting continuous efforts by scholars both domestically and internationally to seek improvements.This study aims to provide an effective method for improving the tribological performance of single-crystal silicon.Given that ultraviolet laser processing technology can offer high processing precision and accuracy,this research chooses to use ultraviolet laser technology to create textures on the surface of single-crystal silicon to ensure experimental consistency and repeatability.To investigate the tribological performance of single-crystal silicon samples with different texture parameters,dry sliding tests were conducted with an MRTR-1 friction and wear test machine under standard atmospheric conditions at room temperature.The instantaneous friction coefficients of single-crystal silicon textured samples recorded by the experimental instrument were of vital importance for analyzing how texture influences friction and wear behavior.To gain deeper insights into the structural changes and wear patterns induced by surface texturing,optical microscopy,scanning electron microscopy(SEM),and X-ray energy-dispersive spectroscopy(EDS)were employed to examine the macro and micro wear morphology of single-crystal silicon textured samples,as well as the elemental composition and distribution state.This multi-faceted approach is aided in analyzing the impact of texture on the tribological properties of single-crystal silicon from a different perspective.Furthermore,an electronic balance was used to measure the mass of the single-crystal silicon textured samples before and after friction and wear tests,and the wear rate was calculated using relevant formulas.This quantified the contribution of surface texture to reduce the wear of single-c

关 键 词：微织构 单晶硅 摩擦磨损 激光加工 摩擦因数 磨损率 摩擦生热 

分 类 号：TH117.1[机械工程—机械设计及理论]