集成微光学陀螺研究现状、发展趋势和挑战  

Research Status,Development Trend and Challenges of Integrated Micro-Optical Gyro

作　　者：邹康 曲天良 张熙 ZOU Kang;QU Tianliang;ZHANG Xi(Huazhong Institute of Optoelectronics Technology,Wuhan 430223)

机构地区：[1]华中光电技术研究所,武汉430223

出　　处：《飞控与探测》2024年第2期73-87,共15页Flight Control & Detection

摘　　要：随着集成光子学和微纳工艺的飞速发展,微光学陀螺以其在芯片化、集成化上的优势广泛应用于下一代高精度小型化惯性导航系统中,在国防武器、微型飞行器以及无人机器控制等领域发挥重要作用。充分调研了国内外微光学陀螺研制方案及研究现状,介绍了包括干涉式、谐振式、布里渊散射式光学陀螺以及微光机电陀螺等四类微光学陀螺的工作原理和性能指标;光学微腔作为微光学陀螺中角速度核心敏感器件,其性能直接决定着陀螺系统精度指标,因此充分论述了氮化硅波导以及回音壁模式等新体制微腔的特性及优点,并针对其传输损耗、品质因子和陀螺性能等指标进行了对比和分析;最后总结了微光学陀螺芯片化的发展趋势以及在分立元器件性能提升、系统耦合与封装上遇到的机遇和挑战。With the rapid development of integrated photonics and micro-nano technology,the micro-optical gyro is widely applied in next-generation high-precision miniaturized inertial navigation systems with its advantages in chip-based and integration,and plays an important role in the fields of defense weapons,micro air vehicles and unmanned machine control.In this paper,we investigate the development scheme and research status of micro-optical gyroscopes at home and abroad,and introduce the working principles and performance of four types of micro-optical gyroscopes,including interferometric,resonant,Brillouin scattering,and micro-optical electromechanical types.As the sensitive device of angular velocity in the micro-optical gyroscope,the performance of optical micro-cavity directly determines the accuracy of the gyroscope system.Therefore,the characteristics and advantages of new micro-cavity such as silicon nitride waveguide and whispering gallery mode are fully discussed,and their transmission loss,quality factor and gyroscope performance are compared and analyzed.Finally,the chip-based development trend of micro-optical gyroscope,the opportunities and challenges encountered in the performance improvement of discrete components,system coupling and packaging are summarized.

关 键 词：微光学陀螺 集成光子学 光学微腔 氮化硅波导 回音壁模式 

分 类 号：TN248.4[电子电信—物理电子学]