509 nm高功率宽调谐外腔面发射激光器  

509 nm high power wide-tuned external cavity surface emitting laser

作　　者：王涛 彭雪芳 贺亮 沈小雨 朱仁江[1] 蒋丽丹[1] 佟存柱[2] 宋晏蓉[3] 张鹏[4] Wang Tao;Peng Xue-Fang;He Liang;Shen Xiao-Yu;Zhu Ren-Jiang;Jiang Li-Dan;Tong Cun-Zhu;Song Yan-Rong;Zhang Peng(College of Physics and Electronic Engineering,Chongqing Normal University,Chongqing 401331,China;Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences,Changchun 130033,China;Faculty of Sciences,Beijing University of Technology,Beijing 100124,China;National Center for Applied Mathematics in Chongqing,Chongqing Normal University,Chongqing 401331,China)

机构地区：[1]重庆师范大学物理与电子工程学院,重庆401331 [2]中国科学院长春光学精密机械与物理研究所,长春130033 [3]北京工业大学理学部,北京100124 [4]重庆师范大学重庆国家应用数学中心,重庆401331

出　　处：《物理学报》2024年第12期198-204,共7页Acta Physica Sinica

基　　金：在渝本科高校与中国科学院所属院所合作项目(批准号:HZ2021007);重庆市教委科技研究计划(批准号:KJQN202200557,KJQN202300525);国家自然科学基金(批准号:61975003,61790584,62025506);重庆师范大学(人才引进/博士点)基金(批准号:23XLB003)资助的课题。

摘　　要：报道了一种高功率宽调谐外腔面发射绿光激光器,利用设计的1018 nm半导体增益芯片、折叠镜以及后端镜构成结构紧凑的V型腔,使用长度为10 mm的Ⅰ类相位匹配三硼酸锂(LiB_(3)O_(5),LBO)非线性频率变换晶体进行腔内倍频,实现了509 nm波长的高功率绿光输出.通过在腔内插入双折射滤波片(birefringent filter,BRF),可获得连续调谐的激光波长.当BRF厚度为1 mm时,基频激光和倍频绿光的波长调谐范围分别为47.1 nm和20.1 nm.可调谐绿光的最大输出功率为8.23 W,对应的倍频转换效率为68.2%,相应的从吸收泵浦光到倍频绿光的光-光转换效率为16.6%.High power widely tunable green lasers have potential applications in many fields such as biomedicine,lidar,laser spectroscopy,laser display,underwater wireless optical communication,and fine processing of nonferrous metals.Vertical-external-cavity surface-emitting lasers,also known as semiconductor disk lasers,have the advantages of high power,good beam quality,and wide bandwidth of gain medium.In this work,a gain chip with a reverse-growth epitaxy structure and an emitting wavelength of 1018 nm is designed.In the DBR reflection spectrum,a bandwidth of 74 nm is achieved above a reflectivity of greater than 99.1%,laying a solid foundation for achieving high-power widely tunable output.The laser cavity combines a 1018 nm semiconductor gain chip,a folded mirror,and a plane mirror to construct a compact Ⅴ-type resonant cavity.A class-Ⅰ phase-matched LBO nonlinear crystal with a length of 10 mm is placed at the beam waist of the cavity to realize an efficient frequency doubling process to produce a 509 nm green laser.To meet the requirement for the polarization during frequency conversion and to tune the oscillating wavelength of the laser,a birefringent filter(BRF)is employed in the laser resonant cavity.When the thickness of the used BRF is 1 mm,the obtained wavelength tuning range of the fundamental laser and the frequency doubled green laser are 47.1 nm and 20.1 nm,respectively,showing a good tuning capability of the laser.The laser’s performance varies with the thickness of the BRF.When using a 2 mm BRF,a maximum power output of the frequency-doubled green laser reaches 8.23 W during continuous tuning,indicating an ideal compatibility of wide tuning characteristics with a high power output.Meanwhile,its beam quality M^(2) factors are 1.00 and 1.03 in the x-and y-direction,respectively,demonstrating a near diffraction-limited excellent beam quality.This green laser also possesses a frequency doubling conversion efficiency of up to 68.2%,which can efficiently converse the fundamental laser into the frequency

关 键 词：外腔面发射激光器 腔内倍频 双折射滤波片 可调谐 

分 类 号：TN248[电子电信—物理电子学]