集成电路工厂Fab中实验室布局分析  

Layout Analysis of the Laboratory in the Fab of the Integrated Circuit Factory

作　　者：雍倩文 张东[1] 赵倩 YONG Qian-wen;ZHANG Dong;ZHAO Qian(S.Y.Technology,Engineering&Construction CO.,LTD)

机构地区：[1]世源科技工程有限公司

出　　处：《中国集成电路》2024年第6期29-33,71,共6页China lntegrated Circuit

摘　　要：集成电路工厂实验室已逐渐成为建厂的标准配置,其在集成电路生产厂房(Fab)中的位置选择上需考虑洁净流线、空间需求、微振控制、电磁控制等因素,在工艺布局中需考虑设备之间的联系、设备排水排液与收集、设备电磁防控以及职业卫生等要求,本文针对实验室在Fab中的位置选择和工艺布局,给出了一些建议并有针对性的进行了优缺点对比分析,为集成电路工厂实验室的位置选择与布局设计提供参考。The laboratory has gradually become the standard configuration of the integrated circuit factory.The clean streamline,space requirements,micro-vibration control,electromagnetic control and other factors need to be considered during the location selection in the integrated circuit fabrication,and in view of the equipment linkages,equipment drainage and waste collection,the requirements of electromagnetic prevention and control of equipment and occupational hygiene,etc.This paper put forward some suggestions for the location selection and process layout of the laboratory in the Fab,and made some comparative analysis of the advantages and disadvantages,so as to provide a reference for the location selection and layout design of the laboratory in the integrated circuit factory.

关 键 词：集成电路工厂实验室 微振控制 电磁控制 位置选择 工艺布局 

分 类 号：TN40[电子电信—微电子学与固体电子学]