动态下某电子工厂外延工序工艺设备排风对洁净室气流组织的影响研究  

Study on the influence of exhaust air of process equipment in epitaxial process of an electronics factory on airflow organization in clean room under operational state

作　　者：魏兰 徐晓丽[1] 朱国宁 康佳 赵国云 Wei Lan;Xu Xiaoli;Zhu Guoning;Kang Jia;Zhao Guoyun

机构地区：[1]中国电子工程设计院股份有限公司

出　　处：《洁净与空调技术》2024年第2期8-14,共7页Contamination Control & Air-Conditioning Technology

摘　　要：近年来国内外针对工艺设备对电子工厂洁净室气流组织影响开展相关研究,但均未考虑工艺设备排风的影响。针对是否考虑工艺设备排风时某电子工厂外延工序洁净室流场进行CFD模拟对比分析,发现两者偏差很大。动态下外延工序工艺设备设有排风,工艺设备排风对洁净室速度、压力分布等影响较大,必须考虑工艺设备排风对洁净室气流组织的影响。为了获得准确的工艺设备排风量,对比分析了利用生产系统排风管单个传感器采集的排风量和现场多点测试得到的机台排风量之间的差异,并将两组数据分别作为工艺设备排风量输入条件进行洁净室气流组织仿真模拟,通过仿真与测试数据对比分析,发现采用第二种方法得到的模拟结果与实测数据吻合很好,验证仿真模拟结果的准确性。并得到了动态下外延工序洁净室速度、压力分布等真实气流组织情况。In recent years,domestic and foreign researches have been carried out on the influence of process equipment on airflow organization in clean room of electronic factory,but the influence of process equipment exhaust air has not been considered.This paper conducts CFD simulation and comparison analysis of the cleanroom flow field of an electronic factory's epitaxial process whether to consider exhaust air of process equipment,and finds that the deviation between the two is very large.The process equipment of epitaxial process is equipped with exhaust air under operational state.The exhaust air of process equipment has a great influence on the velocity and pressure distribution of clean room,and the influence of exhaust air of process equipment on air flow organization of clean room must be considered.In order to obtain the accurate exhaust volume of process equipment,the difference between the exhaust volume collected by a single sensor of the exhaust pipe of the production system and the exhaust volume obtained by on-site multi-point test was compared and analyzed.The two sets of data were respectively used as input conditions for the exhaust volume of process equipment to simulate the airflow organization of clean room.Through the comparison and analysis of simulation and test data,it is found that the simulation results obtained by the second method are in good agreement with the measured data,and the accuracy of the simulation results is verified.The real airflow organization such as speed and pressure distribution in clean room of epitaxial process under operational state was obtained.

关 键 词：动态 CFD 工艺设备排风 洁净室 气流组织 

分 类 号：TU834.31[建筑科学—供热、供燃气、通风及空调工程]