高光束质量大功率垂直腔面发射激光器  

High-Beam-Quality High-Power Vertical-Cavity Surface-Emitting Laser

作　　者：闫观鑫 郝永芹 Yan Guanxin;Hao Yongqin(State Key Laboratory of High Power Semiconductor Laser,Changchun University of Science and Technology,Changchun 130022,Jilin,China)

机构地区：[1]长春理工大学高功率半导体激光国家重点实验室,吉林长春130022

出　　处：《中国激光》2024年第8期1-6,共6页Chinese Journal of Lasers

基　　金：吉林省科技发展计划(20200401073GX)。

摘　　要：采用新型多环形腔结构优化垂直腔面发射激光器(VCSEL)的光场分布,解决了大孔径器件严重的载流子聚集效应导致的输出功率低、光束质量差的问题。研究结果表明:新型结构VCSEL较孔径相同的传统结构器件呈现更低的阈值电流,特别是输出功率较传统结构提高了近56%,且远场呈高斯分布。研究工作为实现高光束质量大功率垂直腔面发射激光器提供了新的技术途径。Objective Compared with edge-emitting lasers,vertical-cavity surface-emitting lasers(VCSELs)have superior performance,such as a lower threshold current,single longitudinal-mode output,easy 2D array integration,low power consumption,and low fabrication cost.With the development of large apertures as well as 2D arrays of VCSELs,the output power of VCSELs has been significantly improved,and they are widely used in such fields as optical communication,optical interconnection,and optical information processing.In addition,the applications of VCSEL devices in the consumer field are becoming increasingly extensive,such as LiDAR,distance sensing,autofocusing,3D sensing,rainbow-mode recognition,air and water quality detection,and virtual reality(VR)/augmented reality(AR)/mixed reality(MR).In recent years,the performances of VCSELs in terms of output power,conversion efficiency,modulation bandwidth,and reliability have improved continuously.However,high-power VCSEL single-tube or array devices are mostly multi-transverse-mode outputs,resulting in poor output beam quality.Therefore,improving device power while obtaining better beam quality in the optical field is a technical challenge that current researchers must solve.In this study,a novel multi-ring cavity structure is used to integrate VCSEL arrays to obtain a better far-field distribution while maintaining a high power output,further expanding the application range of VCSELs in the field of smart devices.Methods In this study,by analyzing the reasons for the non-uniform carrier distribution of large-aperture VCSELs,a multi-annular cavity structure[Fig.2(b)]is designed to separate the injected current region into multiple regions to suppress the carrier aggregation effect.The finite-different time-domain(FDTD)method is used for the simulation to optimize the optical field distribution by adjusting the size of the annular cavities and the percentage of the light-out region.On this basis,traditional and new-structure VCSELs with identical external diameters of light exit

关 键 词：激光器 垂直腔面发射激光器 高功率 光场分布 光束质量 

分 类 号：TN248.4[电子电信—物理电子学]