表面高阶曲线光栅半导体激光器横模特性分析  

Transverse Mode Characteristics Analysis of Semiconductor Laser withHigh⁃Order Surface Curved Gratings

作　　者：梁宏进 邹永刚 范杰 付曦瑶 史可 田锟 Liang Hongjin;Zou Yonggang;Fan Jie;Fu Xiyao;Shi Ke;Tian Kun(State Key Laboratory of High Power Semiconductor Laser,Changchun University of Science and Technology,Changchun 130022,Jilin,China)

机构地区：[1]长春理工大学高功率半导体激光国家重点实验室,吉林长春130022

出　　处：《中国激光》2024年第8期38-45,共8页Chinese Journal of Lasers

基　　金：吉林省科技发展计划项目(20210201030GX);重庆市自然科学基金面上项目(CSTB2022NSCQ-MSX0401)。

摘　　要：半导体激光器在光通信、生物医疗、激光雷达等领域中得到广泛应用,其单模稳定输出特性一直是国内外的研究热点。制备了一种基于表面高阶曲线光栅的宽脊波导半导体激光器,刻蚀曲线型高阶光栅后高阶横模损耗远大于基横模损耗,同时设置宽脊电流限制注入结构,使得高阶横模激射阈值高于基横模阈值,从而改善器件的横模特性并压窄光谱线宽。利用温控模块将器件的工作温度控制为18℃,对腔长为2 mm、条宽为500μm的器件进行测试,在0.5 A电流下测得慢轴发散角为5.3°,快轴发散角为29.2°,在1 A驱动电流下测得3 dB光谱线宽为0.173 nm,边模抑制比为22.6 dB。实验结果表明,表面高阶曲线光栅对宽脊波导半导体激光器中的高阶横模起到了抑制作用且能够压窄光谱线宽,有助于实现半导体激光器的单模稳定输出,同时器件采用紫外光刻工艺,大幅降低了器件的制备难度。Objective Semiconductor lasers have been widely used in industrial manufacturing,medical diagnosis,lidar,and other fields because of their small size,high electro-optical conversion efficiency,long life,and direct-current drive.With the development of technology,higher requirements have been placed on laser light sources for different applications,such as high output power,narrow spectral linewidth,stable wavelength,and near-fundamental mode output.Researchers have performed a great deal of work in this area,making a series of breakthroughs ranging from broad-area semiconductor lasers to narrow-ridge semiconductor lasers and then to grating coupling.Distributed feedback semiconductor lasers using buried gratings can obtain high spectral purity;however,there are preparation difficulties in their re-growth.Researchers have found that surface gratings for coupling optical fields exhibit good working characteristics.To improve the power,a distributed Bragg reflector laser diode with tapered gratings combined with a master oscillator power amplifier is produced.Increasing the ridge width is a more direct method,which is commonly used;however,additional transverse mode suppression mechanisms need to be introduced,such as transverse coupled gratings and lateral microstructures.The exploration of single-mode stable-output semiconductor lasers has been a popular topic in related fields worldwide.In this study,a wide-ridge waveguide-distributed feedback semiconductor laser based on high-order curved surface gratings is prepared.Curved gratings and current-limited injection structures can suppress the high-order transverse mode in a wideridge waveguide and improve the power and spectral purity of the device.In addition,the use of ultraviolet lithography significantly reduces the difficulty of fabrication.Methods The transverse mode of the device is investigated using curved gratings and a current-limited injection structure,and the experimental results are analyzed.The effect of the ridge waveguide on the transverse mode is

关 键 词：激光器 半导体激光器 高阶布拉格光栅 曲线光栅 高阶横模 远场发散角 

分 类 号：TN365[电子电信—物理电子学]