基于远场光分布测量微透镜面形误差峰谷值的方法  

Method of Measuring Surface Error Peak to Valley of Micro Lens Based onFar-Field Light Distribution

作　　者：唐乐 夏良平 张满 张为国[3] 孙昊[2] 王春艳[2] 党随虎[1] 杜春雷 Tang Le;Xia Liangping;Zhang Man;Zhang Weiguo;Sun Hao;Wang Chunyan;Dang Suihu;Du Chunlei(Key Laboratory of Micro Nano Optoelectronic Devices and Intelligent Perception Systems,Yangtze Normal University,Chongqing 408100,China;School of Opto-Electronic Engineering,Changchun University of Science and Technology,Changchun 130022,Jilin,China;Research Center for Micro-Nano Manufacturing and System Integration,Chongqing Institute of Green and Intelligent Technology,Chinese Academy of Sciences,Chongqing 400714,China;Zhuhai Multiscale Optoelectronics Technology Co.,Ltd,Zhuhai 519060,Guangdong,China)

机构地区：[1]长江师范学院微纳光电器件与智能感知系统重点实验室,重庆408100 [2]长春理工大学光电工程学院,吉林长春130022 [3]中国科学院重庆绿色智能技术研究院微纳制造与系统集成研究中心,重庆400714 [4]珠海迈时光电科技有限公司,广东珠海519060

出　　处：《光学学报》2024年第7期181-187,共7页Acta Optica Sinica

基　　金：重庆市科技局项目(CSTB2022NSCQ-LZX0056,2022TIAD-KPX0159);重庆市教委项目(KJZD-K202101403,KJCX2020049,HZ2021014,CXQT20027,KJZD-K202201401);吉林省教育厅科学研究项目(JJKH20220755KJ)。

摘　　要：针对传统微透镜面形测试光路复杂和效率不高的问题,提出了一种基于微透镜远场光斑高效提取环带状面形误差峰谷(PV)值的方法。基于几何光学原理,计算了不同环带误差形成的光斑的分界线位置;建立了环带误差的三维模型,通过仿真不同误差模型下的远场光斑,获得了分界线内外光强比值和环带误差值的对应关系;最后利用微纳加工技术制备出不同环带误差的微透镜阵列,搭建测试光路,通过测试获得了不同环带误差下的光斑能量分布,通过模型计算获得的微透镜环带状面形误差PV值与干涉仪测试结果一致。Objective In the field of optics,the miniaturization and integration of optical systems and optical chips are inevitable trends.Micro lenses,as core devices,are widely used in optical imaging,homogenizing lighting,and optical communication.The accuracy of the surface shape determines the optical properties of micro lenses,making the detection of surface shape errors crucial.During fabrication,the nonlinear effect of photoresist often leads to the appearance of convex or concave annular errors on the micro lens surface.These annular errors significantly impact the optical performance of micro lenses,necessitating the development of a method to quickly detect them.Compared with the traditional profiler,Hartmann wavefront detection,and interferometry methods,this method ensures a simpler test light path,easier operation,and improved test efficiency.Methods The study focused on the impact of surface shape errors on the distribution of light fields,based on the structure model of the banded error.The position of the boundary(R1)of the light spot formed by different banded errors was calculated following the principles of geometrical optics.Additionally,a method was proposed to determine the surface shape error of the band by analyzing the ratio of light intensity inside and outside the boundary.Through simulations of farfield light spots under different error models,the relationship between the ratio of light intensity inside and outside the boundary and the error value of the band was established.To validate the findings,micro lens arrays with various banded errors were fabricated using micro-nano machining technology.A test light path was then constructed to measure the spot energy distribution under different banded errors.The measured results were basically consistent with the simulated values.Results and Discussions Based on the 3D model structure of the girdle error,the peak to valley(PV)value of the girdle surface error of the micro lens obtained through optical software simulation and experimental testing,is f

关 键 词：光学器件 微透镜 远场光斑 环带状面形误差 光斑能量比 

分 类 号：O439[机械工程—光学工程]