用于迷你无人飞行器探测的硅基MEMS轮形振膜光纤声传感器研制  

Development of Fiber-Optic Acoustic Sensors with Silicon-Based MEMSWheel-Shaped Diaphragm for Mini-Unmanned Aerial Vehicle Detection

作　　者：纪康宁 胡昕宇 熊林森 汪海波 祁志美 Ji Kangning;Hu Xinyu;Xiong Linsen;Wang Haibo;Qi Zhimei(State Key Laboratory of Transducer Technology,Aerospace Information Research Institute,Chinese Academy of Sciences,Beijing 100190,China;School of Electronic,Electrical and Communication Engineering,University of Chinese Academy of Sciences,Beijing 100049,China;College of Materials Science and Opto-Electronic Technology,University of Chinese Academy of Sciences,Beijing 100049,China)

机构地区：[1]中国科学院空天信息创新研究院传感技术国家重点实验室,北京100190 [2]中国科学院大学电子电气与通信工程学院,北京100049 [3]中国科学院大学材料科学与光电技术学院,北京100049

出　　处：《光学学报》2024年第7期216-226,共11页Acta Optica Sinica

基　　金：国家重点研发计划(2022YFB32007300);北京市自然科学基金(4224095)。

摘　　要：针对迷你无人飞行器(mini-UAV)探测难度大的问题,仿真设计并制作了谐振频率接近mini-UAV噪声特征频率的硅基微机电系统(MEMS)轮形振膜,结合精密机械加工制作了光纤法布里-珀罗干涉式声传感器。测试结果表明,该光纤声传感器的谐振频率为7.279 kHz,与仿真结果基本一致,其在频率为7 kHz声波正入射的条件下的灵敏度为1.8 V/Pa,信噪比为71 dB,最小可探测声压为99μPa/Hz0.5。值得强调的是,该声传感器对声波的响应呈现“8”字形的方向依赖性,表明其具有识别声源方向的能力。进一步在户外测试了该光纤声传感器对mini-UAV的探测能力,结果表明,声传感器能够在65 m的范围内探测到mini-UAV噪声,其探测距离是商用驻极体声传感器的3倍左右。所研制的硅基MEMS轮形振膜光纤声传感器为解决实践中mini-UAV探测难的问题提供了一种简单有效的工具。Objective Mini-unmanned aerial vehicle(Mini-UAV)is widely employed in scientific research and entertainment due to its small size,low cost,easy operation,and high flexibility.However,the abuse of mini-UAVs has caused great hidden dangers to public security and personal privacy.Therefore,radio,radar,image recognition,and other detection methods have been proposed to meet the urgent need for mini-UAV detection and surveillance.However,since mini-UAVs have low altitudes,low speeds,and a small reflective cross-sectional area,it is difficult for radars to detect them quickly under the interference of the complex background.Additionally,radio detection is prone to false alarms due to severe electromagnetic interference at low altitudes.Although CNN-based image recognition has a high detection accuracy,the ability to accurately distinguish between birds and mini-UAVs is affected by image resolution,which needs to be improved.Meanwhile,the above methods have complex equipment,high detection costs,and poor real-time performance.In contrast,the mini-UAV can be quickly detected in noisy low-altitude environments by acoustic detection,which features sound real-time performance,simple equipment,and low cost.However,the current acoustic sensors adopted for acoustic detection have low sensitivity and do not recognize the sound source direction.Therefore,we fabricate a fiber-optic acoustic sensor with a resonant MEMS wheel-shaped diaphragm to detect acoustic signals with high sensitivity and high signal-to-noise ratio(SNR)near the resonance peak.The sensor has an 8 shaped directional response,which allows for the identification of the sound source direction.Finally,a new method is provided for mini-UAV detection.Methods To improve the sensitivity of optical fiber acoustic sensors and reduce the damping effect caused by the enclosed back cavity of the circular diaphragm,we adopt a wheel-shaped diaphragm with an open acoustic back cavity as the acoustic sensing diaphragm.The wheel-shaped diaphragm consists of a central diaphragm c

关 键 词：传感器 光纤声传感器 MEMS轮形振膜 迷你无人飞行器探测 

分 类 号：TN253[电子电信—物理电子学]