端面薄膜法布里-珀罗腔光纤动态压力传感器仿真与实验研究  

Simulation and Experimental Research on Fiber-Optic Dynamic PressureSensor Based on a Fiber-Tip Film-Type Fabry-Perot Cavity

作　　者：张雄星[1] 孙哲 赵学庆[2] 高子皓 冯晓军[3] 潘文[3] 陈海滨[1] Zhang Xiongxing;Sun Zhe;Zhao Xueqing;Gao Zihao;Feng Xiaojun;Pan Wen;Chen Haibin(School of Optoelectronic Engineering,Xi’an Technological University,Xi’an 710021,Shaanxi,China;Northwest Institute of Nuclear Technology,Xi’an 710024,Shaanxi,China;Xi’an Modern Chemistry Research Institute,Xi’an 710065,Shaanxi,China)

机构地区：[1]西安工业大学光电工程学院,陕西西安710021 [2]西北核技术研究所,陕西西安710024 [3]西安近代化学研究所,陕西西安710065

出　　处：《光学学报》2024年第7期227-235,共9页Acta Optica Sinica

基　　金：激光与物质相互作用国家重点实验室开放基金(SKLLIM2007);陕西省国际科技合作重点项目(2023-GHZD-52)。

摘　　要：为实现冲击波动态信号的测量,研制了一种光纤端面镀金-派瑞林-金三层结构的薄膜式光纤法布里-珀罗压力传感器。对该传感器进行了理论分析与仿真,搭建了静态和动态压力测量系统,并对其进行测试与分析。结果表明:在0~60 MPa的静态压力测量范围内,传感器的波长灵敏度和腔长灵敏度分别为0.0809 nm/MPa和0.3200 nm/MPa,与仿真结果一致;在动态压力测量中,传感器成功捕捉到了压力峰值为7.41 MPa和上升时间为75 ns的冲击波信号。Objective Shock wave is a kind of compression wave in which the wavefront propagates in the form of a synoptic surface in an elastic medium.Its typical feature is the discontinuous abrupt changes of state parameters of the medium on the abrupt surface,such as pressure,density,and temperature.As the study of shock waves progresses,it has been found that shock wave technology has great civilian value,so the measurement of shock wave signals has become increasingly important.The formation and propagation of shock waves are accompanied by overpressure and rapid changes in pressure.The response speed and reliability of the corresponding pressure sensors have more demanding requirements.Traditional electrical shock wave pressure sensors are susceptible to electromagnetic interference,temperature range tolerance,rise time,and other issues,which limit the application of such sensors.Fiber-optic Fabry-Perot(F-P)pressure sensors,as an important branch of fiber-optic sensors,provide new possibilities for dynamic pressure measurement of shock waves due to their advantages of fast response speed,high sensitivity,small size,and high resistance to electromagnetic interference.To achieve the dynamic pressure measurement of shock waves,a thin-film fiber-optic F-P pressure sensor with a fiber-tip coating is studied.Methods The basic structure of the thin-film fiber-optic F-P sensor studied in this paper mainly consists of two gold films with different thicknesses,a layer of parylene film serving as the F-P cavity,and a single-mode optical fiber for optical field coupling.When the shock wave pressure was applied to the end surface of the sensor,the parylene film was subjected to pressure,and deformation was produced,causing a change in the F-P cavity length.This change in length then affected the interference of reflected light produced by the two gold films on the front and back surfaces of the F-P cavity.Before the sensor was fabricated,the optical and mechanical aspects of the sensor were simulated using finite element simulatio

关 键 词：光纤传感器 法布里-珀罗腔 薄膜 压力测量 

分 类 号：O436[机械工程—光学工程]