Plasma density enhancement in radio-frequency hollow electrode discharge  

作　　者：贺柳良 何锋 欧阳吉庭 Liuliang HE;Feng HE;Jiting OUYANG(College of Science,Beijing University of Civil Engineering and Architecture,Beijing 102616,People’s Republic of China;School of Physics,Beijing Institute of Technology,Beijing 100081,People’s Republic of China)

机构地区：[1]College of Science,Beijing University of Civil Engineering and Architecture,Beijing 102616,People’s Republic of China [2]School of Physics,Beijing Institute of Technology,Beijing 100081,People’s Republic of China

出　　处：《Plasma Science and Technology》2024年第4期44-51,共8页等离子体科学和技术（英文版）

摘　　要：The plasma density enhancement outside hollow electrodes in capacitively coupled radio-frequency(RF) discharges is investigated by a two-dimensional(2D) particle-in-cell/Monte-Carlo collision(PIC/MCC) model. Results show that plasma exists inside the cavity when the sheath inside the hollow electrode hole is fully collapsed, which is an essential condition for the plasma density enhancement outside hollow electrodes. In addition, the existence of the electron density peak at the orifice is generated via the hollow cathode effect(HCE), which plays an important role in the density enhancement. It is also found that the radial width of bulk plasma at the orifice affects the magnitude of the density enhancement, and narrow radial plasma bulk width at the orifice is not beneficial to obtain high-density plasma outside hollow electrodes.Higher electron density at the orifice, combined with larger radial plasma bulk width at the orifice,causes higher electron density outside hollow electrodes. The results also imply that the HCE strength inside the cavity cannot be determined by the magnitude of the electron density outside hollow electrodes.

关 键 词：RF capacitively coupled plasma sources plasma density enhancement hollow cathodeeffect hollow electrode 

分 类 号：O53[理学—等离子体物理]