基于马赫-曾德尔干涉仪的1×8硅基热光开关  

1×8 Silicon-Based Thermo-Optic Switch Based on Mach-Zehnder Interferometers

作　　者：高小勇 刘阳阳 胡光熹 陆梁军[2] 罗海梅[1] Gao Xiaoyong;Liu Yangyang;Hu Guangxi;Lu Liangjun;Luo Haimei(Key Laboratory of Optoelectronics and Telecommunication of Jiangci Province,Jiangaci Normal University,Nanchang 330022,Jiangci,China;Pinghu Institute of Intelligent Optoelectronics,Shanghai Jiao Tong University,Pinghu 314200,Zhejiang,China)

机构地区：[1]江西师范大学江西省光电子与通信重点实验室,江西南昌330022 [2]上海交通大学平湖智能光电研究院,浙江平湖314200

出　　处：《光学学报》2024年第8期115-124,共10页Acta Optica Sinica

基　　金：国家自然科学基金(11804133);江西省主要学科学术和技术带头人培养项目(20232BCJ22012);江西省教育厅科学技术研究重点项目(GJJ2200306);江西师范大学研究生创新基金项目(YJS2022086)。

摘　　要：设计并制备了一种基于树形结构的1×8硅基热光开关,该热光开关由1个2×2和6个1×2马赫-曾德尔干涉仪的基本单元结构组成。该1×8硅基热光开关采用与互补金属氧化物半导体兼容的工艺制造。通过氮化钛加热器来改变波导的温度,利用硅的热光效应实现光开关功能。实验结果表明:在1550 nm工作波长下,该热光开关的平均片上插入损耗约为1.1 dB;所有输出端口的串扰都小于-23.6 dB;开关响应时间小于60μs。Objective In recent years,the research on silicon-based thermo-optic(TO) devices has focused on in-depth direction and become more complex,and the realization of higher-performance silicon-based TO devices is the main purpose of our research.There are many kinds of silicon-based optical switches developed so far.We design Mach-Zehnder interferometer(MZI)-type silicon-based TO switches with large bandwidth,simple structure,and high robustness,and the N×N TOintegrated switches and the electro-optic(EO)-integrated switches have been widely studied.The EO switch has a fast switching speed(nanosecond level),but its crosstalk and insertion loss are high due to the free carrier absorption effect.In contrast,TO switches excel in maintaining low loss and low crosstalk,but their switching response time is intrinsically limited,typically on the microsecond scale.Optical switches in hybrid network systems are typically used to handle highcapacity and high-bandwidth optical communication services,making TO switches the preferred choice due to their low loss and low crosstalk characteristics.Methods The MZI-type 1×8 silicon-based TO switch proposed and prepared in this paper is composed of one 2×2 MZI and six 1×2 MZI switching units connected by a binary tree structure,which has two input ports and eight output ports in the optical switch,with the first stage comprising a 2×2 MZI switching unit,the second stage comprising two 1×2 MZI switching units,and the third stage comprising four 1×2 MZI switching units.Effective control of the optical signals is achieved by the phase shift of the TO-tuned phase shifter,which directs the light to the destination branch waveguide,thus realizing the optical switching function.The coupler and phase shifter in the optical switching unit are optimized by using the finite-difference time-domain method and the particle swarm optimization algorithm to improve the switching performance and reduce the chip size.The long connecting waveguide is designed as a wide waveguide of 2 to reduce the

关 键 词：集成光学 硅基开关 马赫-曾德尔干涉仪 热光开关 

分 类 号：TN491[电子电信—微电子学与固体电子学]