高重复频率、高功率高次谐波极紫外光源进展及应用  

High Harmonic Extreme Ultraviolet Light Source with High Repetition Rate and Power

作　　者：魏子娟 高熙泽 孟翔宇 李政言 张庆斌[2,4] 兰鹏飞 陆培祥[3,4] Wei Zijuan;Gao Xize;Meng Xiangyu;Li Zhengyan;Zhang Qingbin;Lan Pengfei;Lu Peixiang(School of Optical and Electronic Information,Huazhong University of Science and Technology,Wuhan 430074,Hubei,China;School of Physics,Huazhong University of Science and Technology,Wuhan 430074,Hubei,China;Wuhan National Laboratory for Optoelectronics,Huazhong University of Science and Technology,Wuhan 430074,Hubei,China;Optics Valley Laboratory,Wuhan 430074,Hubei,China)

机构地区：[1]华中科技大学光学与电子信息学院,湖北武汉430074 [2]华中科技大学物理学院,湖北武汉430074 [3]华中科技大学武汉光电国家研究中心,湖北武汉430074 [4]湖北光谷实验室,湖北武汉430074

出　　处：《中国激光》2024年第7期3-21,共19页Chinese Journal of Lasers

基　　金：国家自然科学基金(12275099,52130504)、光谷实验室创新工程项目(OVL2021ZD001)。

摘　　要：超短超强激光脉冲驱动的高次谐波是一种极紫外到软X射线波段的光源,具有指向性好、时空相干性高、亮度高等优点。高次谐波不但是在阿秒时间尺度上研究电子动力学的基础,而且其各类技术优点也使之成为一种有效的桌面型极紫外相干光源,在集成电路制造在线检测、材料科学、生物医药等领域中具有广泛应用。然而,受限于传统钛蓝宝石固体飞秒激光的平均功率和高次谐波传播过程中的转换效率,目前高次谐波极紫外光源的平均功率亟待提高。介绍了高重复频率、高平均功率高次谐波极紫外光源的产生方式及其应用。首先介绍了光纤、固体、啁啾光学参量放大器等新型高重复频率、高平均功率飞秒激光驱动源在高次谐波产生方面的研究进展,之后讨论了激光高次谐波在弱电离气体介质中的宏观传播效应和相位匹配条件。在此基础上,介绍了高平均功率高次谐波极紫外光源在成像检测方面的应用。Significance As a desktop-level extreme ultraviolet(EUV)coherent light source,high harmonic generation(HHG)becomes an indispensable tool in fundamental science fields such as atomic and molecular physics,biomedicine,materials chemistry,and precision spectroscopy.The maximum photon energy of high harmonics in gas extends to the soft X-ray spectral range.Based on the appropriate gating technique of high harmonics,it is possible to generate isolated attosecond pulses with tens of attoseconds pulse widths,providing feasibility for the study of electron motion in atomic and molecular systems on the attosecond time scale.In addition to being critical in basic science,HHG also serves as a coherent light source with wide industrial applications,especially in integrated circuit manufacturing and imaging detection in biomedicine.High harmonic extreme ultraviolet light sources for industrial applications require both high photon energy(100‒500 eV)and higher average power(above mW).To obtain a shorter wavelength high harmonic,the mid-infrared femtosecond laser,combined with nonlinear pulse compression technology,realizes the output of keV photon energy harmonics.The shorter wavelength aids in improving imaging resolution and covering the absorption edge of high atomic number materials,which can be used for extreme ultraviolet spectrum analysis.To improve the average power of higher harmonics,it is better on one hand to use the higher repetition rate and higher power driving laser.On the other hand,improving the conversion efficiency of high harmonics is necessary,which can be realized by controlling the macroscopic propagation process of high harmonics to achieve phase matching.Progress In this study,we focus on the process of producing high harmonics directly in a single pass driven by high repetition rate lasers,and introduce the progress in repetition rate,single pulse energy,and average power improvement of HHG extreme ultraviolet light sources.The paper organizes in the following way:after a brief introduction in the

关 键 词：非线性光学 高次谐波 极紫外光源 飞秒激光器 极紫外成像检测 

分 类 号：O437[机械工程—光学工程]