基于国产商用CLBO晶体的高转换效率、高功率深紫外266 nm激光  

High⁃Conversion⁃Efficiency High⁃Power Deep⁃Ultraviolet 266 nm Laser Based on Domestic Commercially Available CLBO Crystal

作　　者：俞航航 张志韬 玄洪文 Yu Hanghang;Zhang Zhitao;Xuan Hongwen(GBA Branch of Aerospace Information Research Institute,Chinese Academy of Sciences,Guangzhou 510700,Guangdong,China;Guangdong Provincial Key Laboratory of Terahertz Quantum Electromagnetics,Guangzhou 510700,Guangdong,China;University of Chinese Academy of Sciences,Beijing 100049,China)

机构地区：[1]广东大湾区空天信息研究院,广东广州510700 [2]广东省太赫兹量子电磁学重点实验室,广东广州510700 [3]中国科学院大学,北京100049

出　　处：《中国激光》2024年第7期234-240,共7页Chinese Journal of Lasers

基　　金：中国科学院空天信息创新研究院自主部署项目(E2Z2D101,E1Z1D101);中科院人才引进计划(E33310030D);广州市基础与应用基础研究项目(2023A04J0021)。

摘　　要：深紫外激光具有光子能量高、波长短等特点,在激光加工、半导体光刻等领域中具有重要的应用价值。固体激光非线性频率变换是实现高功率、高相干性深紫外激光输出的主要方式之一。采用全固态532 nm激光作为基频光、国产商用CsLiB_(6)O_(10)(CLBO)晶体作为频率变换晶体,在基频光功率为34.2 W时,实现了平均功率为14 W、重复频率为100 kHz、脉冲宽度为1.8 ns的266 nm深紫外激光输出,光-光转换效率达到41%。该深紫外光源具有效率高、结构紧凑的优点,验证了国产商用CLBO晶体的实用性,可进一步获得更稳定、更高功率的深紫外激光输出。Objective Deep-ultraviolet(DUV)lasers have important applications in fields such as laser processing and semiconductor photolithography because of their high photon energy.A DUV laser source must have both a high output power and good beam quality for laser machining.Sum-frequency generation(SFG)in nonlinear optical crystals can be used in a DUV laser to produce shorter and even vacuum ultraviolet wavelengths such as 193 nm.Hence,high-power DUV lasers with a good beam quality have been a hot research topic in recent decades.On the other hand,it is now possible to use a domestic commercially produced CLBO crystal as a key nonlinear optical material for high-power DUV solid-state laser generation.However,the crystal quality for highpower DUV operation has not yet been verified because of the hydroscopic problem.Here,we report a high-power DUV laser output with a good beam quality and high conversion efficiency produced using domestic commercially available CLBO crystals,which demonstrates the potential to achieve a higher power DUV laser output.Methods In our study,we investigate DUV laser generation using CLBO crystals with different lengths.The research focuses on the characteristics of these high-power solid-state DUV light sources,including the output power,efficiency,power stability,beam quality,spectrum,and pulse width.The experimental setup is shown in Fig.1.The pump power is regulated by a combination of a half-wave plate(HWP)and polarizing beam splitter(PBS).The pump spot diameter is adjusted using a plano-convex lens(L1)with a focal length of f=+200 mm and plano-concave lens(L2)with a focal length of f=-100 mm.The dimensions of CLBO crystals are 5 mm×5 mm×10 mm and 5 mm×5 mm×20 mm,respectively.In both,cutting angle(θ)is 61.7°,and the two end-faces of the crystals are polished but have no coating.The CLBO crystals are heated to a temperature greater than 150℃and exposed in a noble gas environment to avoid the hydroscopic problem.The 266 nm DUV laser output is spatially separated from the 532 nm pum

关 键 词：激光器 深紫外激光 全固态激光 CsLiB_(6)O_(10)晶体 高功率 

分 类 号：TN23[电子电信—物理电子学] TN248.1