基于白光干涉仪的微小齿轮高精度测量方法  

High-Precision Measurement Method for Micro Gears Based on White Light Interferometry

作　　者：宋辉旭 蒋金哲 石照耀[1] 于渤[1] SONG Huixu;JIANG Jinzhe;SHI Zhaoyao;YU Bo Beijing(Engineering Research Center of Precision Measurement Technology and Instruments,Beijing University of Technology(BJUT),Beijing 100124,China)

机构地区：[1]北京工业大学,北京市精密测控技术与仪器工程技术研究中心,北京100124

出　　处：《计量科学与技术》2024年第4期3-10,共8页Metrology Science and Technology

基　　金：国家自然科学基金项目(52105043);中国科协青年人才托举工程(2021QNRC001)。

摘　　要：实现精密测量的前提在于被测物理量的准确获取,目前高精度且昂贵的数控齿轮测量仪器得到普遍应用。然而模数小于0.1mm、直径小于1mm的微型齿轮由于齿槽宽度过小,传统的接触式测量手段无法测量完整齿廓。光学测量手段也因轮齿遮挡和齿面倾角的限制存在无法获取齿根数据的问题。针对此现状,提出了一种基于白光干涉测量原理的微小齿轮高精度测量方法。根据干涉图样的出现顺序实现对微小齿轮端面倾斜程度的实时监测,确保了齿轮轮廓的提取精度;基于齿轮端面三维点云数据确定齿轮中心,有效提升了齿轮定心精度。重点介绍了面向微小齿轮的白光干涉测量原理、端面调平模型以及齿轮误差计算方法。试验结果表明,该方法能够实现对微小齿轮的高精度测量,为解决微小齿轮的精密测量提供了有效手段。Accurate acquisition of the physical quantities to be measured is a prerequisite for achieving precise measurements.Currently,high-precision and expensive CNC gear measuring instruments are widely used.However,for micro gears with a modulus less than 0.1 mm and a diameter less than 1 mm,traditional contact measurement methods cannot measure the complete tooth profile due to the narrow tooth groove width.Optical measurement methods also face the problem of not being able to obtain tooth root data due to tooth occlusion and tooth surface inclination limitations.In response to this situation,a high-precision measurement method for micro gears based on white light interferometry is proposed.Real-time monitoring of the micro gear end face tilt is achieved based on the appearance order of interference patterns,ensuring the extraction accuracy of the gear profile.The gear center is determined based on the three-dimensional point cloud data of the end face,effectively improving the gear centering accuracy.The white light interferometry measurement principle for micro gears,the end face leveling model,and the gear error calculation method are introduced in detail.Experimental results show that this method can achieve high-precision measurement of micro gears,providing an effective means to solve the precision measurement problem of micro gears.

关 键 词：计量学 白光干涉仪 微小齿轮 齿轮测量 齿轮误差 端面调平 

分 类 号：TB921[一般工业技术—计量学]