基于五棱镜的光电自准直仪光束平行度测量  

Measurement of Beam Parallelism of Photoelectric Autocollimators Based on a Pentaprism

作　　者：马娟娟[1,2] 徐爱华 宋潇 武金凤 曾卓 MA Juanjuan;XU Aihua;SONG Xiao;WU Jinfeng;ZENG Zhuo(Institute of Seismology,CEA,Wuhan 430071,China;Wuhan Seismic Metrological Verification&Surveying Engineering Institute Co.,LTD.,Wuhan 430071,China;Hubei Institute of Measurement and Testing Technology,Wuhan 430223,China)

机构地区：[1]中国地震局地震研究所,武汉430071 [2]武汉地震计量检定与测量工程研究院有限公司,武汉430071 [3]湖北省计量测试技术研究院,武汉430223

出　　处：《计量科学与技术》2024年第4期37-44,共8页Metrology Science and Technology

基　　金：地震科技星火计划资助(XH21022)。

摘　　要：为了精密测量光电自准直仪的光束不平行误差,提出了一种基于五棱镜的测量方法。该方法利用五棱镜优化测量光路,从而减小检测过程中所需反射镜面形不平整的影响。同时对光电自准直仪光束不平行误差进行定量分析,并结合实验比较不同光束平行度测量方法的差异。实验结果表明:基于五棱镜的方法测得结果与选取曲率小于5×10-5m-1的反射镜条件下测得结果之差小于0.1″,远优于仅使用平面度一般的反射镜的传统测量方法,前者的复现性达到0.1″。基于五棱镜的测量方法减小了系统误差,能够提升光电自准直仪光束平行度的测量精度。To precisely measure the beam non-parallelism error of photoelectric autocollimators,a method based on a pentaprism has been proposed in this paper.By using a pentaprism,the measurement optical path can be optimized,thereby reducing the influence of surface shape irregularities of the mirror required in the detection process.The error of the nonparallel beam of the photoelectric autocollimator has been quantitatively analyzed,and different methods of beam parallelism measurement are compared experimentally.The results show that the difference between the pentaprism method and using a mirror with a curvature of less than 5×10−5 m−1 is less than 0.1″,which is far superior to the traditional measurement method using a mirror with average flatness.Moreover,the repeatability of the pentaprism method can reach 0.1″.The pentaprism method reduces the system error and improves the measurement accuracy of the beam parallelism of the photoelectric autocollimator.

关 键 词：计量学 光电自准直仪 光束平行度 五棱镜 面形 

分 类 号：TB921[一般工业技术—计量学]