可溶固着软质磨粒抛光薄膜制备及性能研究  

Preparation and Property of Soluble Fixed Soft Abrasive Polishing Film

作　　者：赵天晨 冯凯萍 周兆忠[1,2] 袁巨龙 ZHAO Tianchen;FENG Kaiping;ZHOU Zhaozhong;YUAN Julong(College of Mechanical Engineering,Quzhou University,Zhejiang Quzhou 324000,China;Key Laboratory of Air-driven Equipment Technology of Zhejiang Province,Quzhou University,Zhejiang Quzhou 324000,China;Ultra Precision Manufacturing Center,Zhejiang University of Technology,Hangzhou 310023,China)

机构地区：[1]衢州学院机械工程学院,浙江衢州324000 [2]衢州学院浙江省空气动力装备技术重点实验室,浙江衢州324000 [3]浙江工业大学超精密加工研究中心,杭州310023

出　　处：《表面技术》2024年第12期207-217,共11页Surface Technology

基　　金：浙江省自然科学基金(LZY22E050007,LZY21E050004);国家自然科学基金(52305483,51935008,51975531)。

摘　　要：目的实现微小光学器件高效、高质量、绿色的可溶固着软质磨粒薄膜抛光,对可溶固着软质磨粒抛光薄膜的制备工艺及抛光性能进行研究。方法研究可溶树脂、不可溶树脂、磨粒和薄膜基底等原料对成膜及抛光性能的影响,探索可溶固着软质磨粒抛光薄膜制备工艺,以光纤连接器作为加工对象验证抛光薄膜的抛光特性。结果选用双峰SiO_(2)作为磨粒,采用环氧树脂(质量分数为95%)和聚丙烯酸树脂(质量分数为5%)组成的“可溶”混合树脂为结合剂,可实现磨粒层逐步溶解。在磨粒涂覆层中添加5%(质量分数)的硅橡胶可调节磨粒涂覆层成膜后的弹性模量和硬度,使薄膜兼顾抛光性能和耐用性。对PET薄膜基底进行电晕处理可增强其表面附着力。选用含1%(质量分数为)有机硅烷偶联剂的聚氨酯树脂作为PET基底和磨粒涂覆层连接剂,结合强度好,成膜后表面无裂纹。通过光纤端面抛光对比实验发现,可溶固着软质磨粒抛光薄膜的抛光性能和耐用性均优于日本NTTAT抛光片的相关性能。可溶固着软质磨粒抛光薄膜使用25次后,光纤端面仍可保持表面光滑,曲面面形完整,表面粗糙度Ra小于5 nm,回波损耗大于45 dB,连接损耗小于0.1 dB。结论抛光实验表明,可溶固着软质磨粒抛光薄膜能实现光纤端面的高效精密加工。The work aims to realize high efficiency and high quality of soluble fixed soft abrasive film polishing for micro optical devices,and study the preparation process and polishing performance of soluble fixed soft abrasive films.The influence of raw materials such as soluble resin,insoluble resin,abrasive and film substrate on film formation and polishing performance were studied.The preparation process of soluble fixed soft abrasive polishing films was explored.And the polishing performance of films was verified with the optical fiber connector as a processing object.Experimental results indicated that when the abrasive was double-peak SiO_(2), the binder was a "soluble" mixed resin composed of epoxy resin (95wt.%) andpolyacrylic resin (5wt.%), the abrasive coating layer could be gradually dissolved. Adding 5wt.% silicone rubber to the abrasivecoating layer could adjust the elastic modulus and hardness of the abrasive coating layer after film formation, so that the filmhad both polishing performance and durability. Corona treatment of PET film substrates could enhance its surface adhesion.Polyurethane resin containing 1wt.% organosilane coupling agent was selected as the connecting agent for PET substrates andabrasive coating layers. It has good bonding strength and there were no cracks on the surface after film formation. The results ofoptical fiber end face polishing experiments showed that the polishing performance and durability of soluble fixed soft abrasivepolishing films were superior to that of Japanese NTTAT polishing films. After the soluble fixed soft abrasive polishing filmswere used for 25 times, the surface of optical fiber end face could still keep the smooth, the curved surface shape was complete,the surface roughness Ra was less than 5 nm, the return loss was greater than 45 dB, and the connection loss was less than 0.1dB. In conclusion, soluble fixed soft abrasive polishing films can achieve efficient and precise polishing of fiber end faces.

关 键 词：可溶固结 软质磨粒 抛光薄膜 制备 光纤连接器 

分 类 号：TG580[金属学及工艺—金属切削加工及机床]