石墨舟清洁等离子电源设计与控制  

Design and Control of Graphite Boat Clean Plasma Power Supply

作　　者：薛家祥[1] 王一统 马财钰 金礼 XUE Jiaxiang;WANG Yitong;MA Caiyu;JIN Li(College of Mechanical and Automobile Engineering,South China University of Technology,Guangzhou 510640,China;College of Physics and Mechatronics Engineering,Guizhou Minzu University,Guiyang 550000,China)

机构地区：[1]华南理工大学机械与汽车工程学院,广州510640 [2]贵州民族大学物理与机电工程学院,贵阳550000

出　　处：《自动化与仪表》2024年第6期21-24,30,共5页Automation & Instrumentation

基　　金：国家自然科学基金资助项目(51875213);广东省自然科学基金项目(2214050007061);贵州省省级科技计划项目(ZK[2022]198);贵州省高等学校教学内容和课程体系改革项目(2021083)。

摘　　要：针对现有的石墨舟清洁等离子体电源控制系统动态响应不及时,无法适应大功率调节范围和系统稳定性差的问题,提出了一种等离子体电源设计与控制方法,根据等离子电源的工作原理与负载特性,通过PFM&PSPWM混合调制的控制策略,改变执行频率和移相角,实现了对于多种等离子负载宽功率范围的适应性和全桥逆变的软开关,提高了系统的适应性和稳定性。基于TMS280049研制样机验证了方案的可行性,表明本设计具有实际应用价值。A plasma power supply design and control method is proposed to address the issues of untimely dynamic response,inability to adapt to high-power regulation range,and poor system stability in the existing graphite boat cleaning plasma power supply control system.Based on the working principle and load characteristics of the plasma power supply,a PFM&PSPWM hybrid modulation strategy is used to change the execution frequency and phase shift angle,it has achieved adaptability to a wide power range of various plasma loads and soft switching of full bridge inverters,improving the adaptability and stability of the system.The feasibility of the scheme was verified by developing a prototype based on TMS280049,indicating that this design has practical application value.

关 键 词：等离子体电源 石墨舟清洁 DSP PFM&PSPWM混合调制 

分 类 号：TN86[电子电信—信息与通信工程]