声表面波滤波器温度敏感性仿真研究  

Research on Temperature Sensitivity of Surface Acoustic Wave Filter

作　　者：王吉芳 郑露 陈平静 潘虹芝 杜雪松[1] 董加和[1] 陆川[1] 陈正林 吴浩东[4] 马晋毅[1,3] WANG Jifang;ZHENG Lu;CHEN Pingjing;PAN Hongzhi;DU Xuesong;DONG Jiahe;LU Chuan;CHEN Zhenglin;WU Haodong;MA Jinyi(The 26th Institute of China Electronics Technology Group Corporation,Chongqing 400060,China;Chongqing Medical and Pharmaceutical College,Chongqing 401131,China;Science and Technology on Analog Integrated Circuit Laboratory,Chongqing 400060,China;Key Laboratory of Modern Acoustics,Ministry of Education,Department of Acoustic Science and Engineering,School of Physics,Nanjing University,Nanjing 210093,China)

机构地区：[1]中国电子科技集团公司第二十六研究所,重庆400060 [2]重庆医药高等专科学校,重庆401131 [3]模拟集成电路国家重点实验室,重庆400060 [4]南京大学声学科学与工程系教育部近代声学重点实验室,江苏南京210093

出　　处：《压电与声光》2024年第3期310-314,共5页Piezoelectrics & Acoustooptics

基　　金：重庆市教委科学技术研究项目(KJQN202302803)。

摘　　要：针对不同温度场情况下任意复杂膜系结构和电路拓扑结构的声表面波(SAW)滤波器的温度敏感性精确计算问题,首先将温度场以热应力、热应变的方式耦合声/电本征方程并考虑封装模型的电磁因素,再结合分层级联算法和全波仿真技术,计算任意复杂膜系结构和电路拓扑结构的SAW滤波器的温度敏感性,实现不同温度作用下SAW滤波器频率响应曲线、频率温度系数(TCF)值、损耗、带宽及带外抑制等性能的综合分析。通过41°Y-X LiNbO_(3)/SiO_(2)/Si_poly/Si(111)复合衬底SAW滤波器的优化设计与研制,其设计优化结果与实验结果吻合较好,验证了该方法的有效性和可行性。This study investigates the accurate temperature sensitivity calculation of surface acoustic wave(SAW)filters with arbitrary complex membrane structures and circuit topologies at different temperatures.The temperature field is coupled with the acoustic/electrical equation in the form of thermal stress and strain,considering the electromagnetic factor of the package model.Combining the hierarchical cascade algorithm and full-wave simulation technology,the temperature sensitivity of SAW filters in this specific contextis calculated.In addition,the frequency response characteristic,TCF value,insertion loss,bandwidth and rejection of the SAW filter under different temperatures are comprehensively analyzed.Based on the design of a SAW filter with 41°Y-X LiNbO_(3)/SiO_(2)/Si_poly/Si(111),the results are in good agreement with the experimental results,and the effectiveness and feasibility of the proposed method are verified.

关 键 词：温度敏感性 声表面波(SAW)滤波器 分层级联 全波仿真 

分 类 号：TN65[电子电信—电路与系统]