JGD提拉单晶炉晶体模型的数字化  

Digitalization of a Crystal Model for a JGD Single-Crystal Furnace

作　　者：陈川贵 丁雨憧 龙勇 何晔 吴昊 岑伟 李青蔚 CHEN Chuangui;DING Yuchong;LONG Yong;HE Ye;WU Hao;CEN Wei;LI Qingwei(The 26th Institute of China Electronics Technology Group Corporation,Chongqing 401332,China)

机构地区：[1]中国电子科技集团公司第二十六研究所,重庆401332

出　　处：《压电与声光》2024年第3期333-338,共6页Piezoelectrics & Acoustooptics

摘　　要：中国电科芯片研究院生产的JGD提拉单晶炉是一种上称重自动直径控制激光单晶炉,它实现了提拉法晶体全自动智能生长控制。利用JGD提拉单晶炉控制软件建立提拉法晶体数学模型,晶体生长全程以数学模型为标准,以晶体质量为控制量进行实时闭环反馈控制。该软件建立的晶体数学模型有四段式晶体数学模型和任意多段晶体数学模型两种形式。在设计放肩段时,四段式晶体数学模型充分体现了晶体籽晶段与放肩段、等径段三位一体平滑过渡的理念;而任意多段晶体数学模型在曲线设计上更加灵活多样,晶体数学模型设计更便捷。JGD提拉单晶炉控制软件晶体数学模型被广泛用于多种晶体生长过程,如InSb、YAG等晶体。晶体外形控制良好、品质优良。A JGD-type single-crystal laser furnace produced by China Electronics Technology Chip Research Institute is a single-crystal furnace with automatic diameter control for upward weighing,which helps realize fully automatic intelligent growth control of crystal-pulling methods.The JGD Czochralski crystal furnace control software uses a mathematical model for Czochralski crystal growth.The entire process of crystal growth is based on the mathematical model,and real-time closed-loop feedback control is achieved using a crystal weight as the control variable.This software employsfour-segment and arbitrary multi-segment crystal mathematical models.The former model embodies the concept of smooth transition between the seed crystal,shoulder,and equal-diameter segments in the design of the shoulder segment,and the latter model is more flexible and diverse in curve design,making crystal mathematical model design more convenient.The crystal mathematical model of the JGD single-crystal furnace control software is widely used in various crystal growth processes including those of InSb,YAG,and other crystals.The crystal shape is well controlled and of excellent quality.

关 键 词：自动化 晶体 温场 晶体数学模型 数字化 

分 类 号：TN384[电子电信—物理电子学] TN305