精粗双层绕组磁浮平面电机线圈厚度影响分析  

Analysis of the Influence of Coil Thickness of Fine-Coarse Double-Layer Winding Maglev Planar Motor

作　　者：赵烁 曾理湛[1] ZHAO Shuo;ZENG Lizhan(College of Mechanical Science and Engineering,Huazhong University of Science and Technology,Wuhan 430074,China)

机构地区：[1]华中科技大学机械科学与工程学院,武汉430074

出　　处：《微特电机》2024年第6期1-7,共7页Small & Special Electrical Machines

基　　金：国家自然科学基金项目(52275112)。

摘　　要：新型精粗双层绕组磁浮平面电机(FCDLWMPM)利用靠近磁体的下层线圈产生加速推力、离磁体较远的上层线圈保证匀速运动精度,可兼顾光刻运动不断提升的加速度与精度要求。FCDLWMPM高加速度运动生成的铜耗和谐波力会影响系统精度,而线圈厚度是影响铜耗和谐波力的关键设计参数。对FCDLWMPM进行了电磁力及铜耗建模,介绍了FCDLWMPM的电磁结构及工作模式。基于永磁阵列磁场谐波模型、洛伦兹定律,进行了单线圈电磁力解析求解,推导了DQ解耦控制下的上下层线圈阵列电磁力方程,进而得出了光刻运动下的电机铜耗方程和谐波力占比函数。求解上下层线圈厚度参数值,得到双层绕组厚度对铜耗和谐波力占比的影响规律,讨论双层绕组厚度参数的选择以有效减小铜耗和谐波力占比。The new fine-coarse double-layer winding maglev planar motor(FCDLWMPM)utilizes the lower coil near the magnet to generate acceleration thrust,and the upper coil far from the magnet to ensure uniform motion accuracy,which can balance the continuously improving acceleration and accuracy requirements of lithography motion.The copper loss and harmonic force generated by high acceleration motion of FCDLWMPM will affect system accuracy,and coil thickness is a key design parameter that affects copper loss and harmonic force.Modeling of electromagnetic force and copper loss of FCDLWMPM was conducted,and the electromagnetic structure and working mode of FCDLWMPM were introduced.Based on the harmonic model of the permanent magnet array magnetic field and Lorentz’s law,the single coil electromagnetic force was analyzed and solved.The electromagnetic force equations of the upper and lower coil arrays under DQ decoupling control were derived,and the motor copper loss equation and harmonic force proportion function under photolithography motion were obtained.The thickness parameter values of the upper and lower coils were solved to obtain the influence of the thickness of the double-layer winding on the proportion of copper loss and harmonic force.The selection of the thickness parameter of the double-layer winding was discussed to effectively reduce the proportion of copper loss and harmonic force.

关 键 词：精粗双层绕组磁悬浮平面电机 线圈厚度 铜耗方程 

分 类 号：TM305[电气工程—电机]