IC静电放电瞬态场测试系统校准方法探讨  

Discussion on the Calibration Method of IC Electrostatic Discharge Transient Field Test System

作　　者：张成 吕刚 陈彦[1] 强晓霄 ZHANG Cheng;LV Gang;CHEN Yan;QIANG Xiaoxiao(CEPREI,Guangzhou 511370,China)

机构地区：[1]工业和信息化部电子第五研究所,广东广州511370

出　　处：《电子产品可靠性与环境试验》2024年第3期90-93,共4页Electronic Product Reliability and Environmental Testing

摘　　要：随着集成电路的集成度呈几何级数增长和高分子材料的广泛应用,集成电路静电放电(ESD)危害越发严重。据估计,仅美国每年因此造成的损失就高达100亿美元。为了降低研发成本、减少周期时长,把电磁兼容(EMC)测试提前到了集成电路阶段进行,各测试仪器开发商研发了多种ESD瞬态场抗扰度测试系统,因其具有设备小巧、价格便宜、操作简单等优点而受到热捧,但相关的计量校准研究很少。介绍了测试系统的工作原理,提出采用标准传感器和矢量网络分析仪测量瞬态电磁场强度的校准方案。详细论述了校准原理和参数计算方法,并进行了校准验证,测量结果重复性最好可达0.3 dB。With the geometric growth of integration of integrated circuits and the widespread application of polymer materials,the hazards of electrostatic discharge(ESD)in integrated circuits is becoming more and more serious.The cost caused by this is estimated at$10 billion a year in the United States alone.In order to reduce research and development costs and reduce cycle time,EMC testing has been advanced to the integrated circuit stage.Various testing instrument developers have developed various ESD transient field immunity testing systems,which are popular due to their small size,cheap price,and simple operation.However,there is little research on related metrological calibration.The working principle of the testing system is introduced and a calibration scheme for measuring transient electromagnetic field intensity using standard sensors and vector network analyzers is proposed.The calibration principle and parameter calculation method are discussed in detail,and calibration verification is carried out.The best repeatability of the measurement results can reach 0.3 dB.

关 键 词：校准 集成电路 电磁兼容 静电放电 瞬态场 抗扰度 

分 类 号：TN787[电子电信—电路与系统]