氮空位调控晶格畸变度强化(NbMoTaW)N_(x)薄膜的力学性质和耐磨损性  

Nitrogen Vacancy Regulated Lattice Distortion on Improvement of (NbMoTaW)N_(x) Thin Films:Mechanical Properties and Wear Resistance

作　　者：张睿 张侃 袁梦雅 谷鑫磊 郑伟涛[1] ZHANG Rui;ZHANG Kan;YUAN Mengya;GU Xinlei;ZHENG Weitao(State Key Laboratory of Superhard Materials,College of Materials Science and Engineering,Jilin University,Changchun 130012,China)

机构地区：[1]吉林大学材料科学与工程学院,超硬材料国家重点实验室,长春130012

出　　处：《无机材料学报》2024年第6期715-725,共11页Journal of Inorganic Materials

基　　金：国家自然科学基金(52322206,51972139);国家重点研发计划(2023YFF0716800);吉林省自然科学基金(20210101062JC)。

摘　　要：高熵过渡金属氮化物(HENs)具有热稳定性,抗腐蚀、抗氧化性以及优异的力学性质,可用作结构部件及运动部件的表面防护薄膜。然而,受HENs组元多样性的影响,宽泛可调的金属组分与HENs力学性质之间的映射关系相当复杂。本工作以(NbMoTaW)N_(x)薄膜为研究对象,基于磁控溅射方法调节薄膜生长过程中氮气流量,制备了不同氮含量的(NbMoTaW)N_(x)(x=0,0.59,0.80,0.95)薄膜,研究了(NbMoTaW)N_(x)薄膜的成分、结构、形貌与性能,并对薄膜力学性质的主要影响机制进行了系统探究。结果表明,通过调节氮空位,实现了对氮原子及金属原子亚晶格畸变度的协同调控,得益于氮原子和金属原子亚晶格的高畸变度,(NbMoTaW)N_(0.80)样品具有最高的硬度与最好的耐磨损性能。排除电子结构、残余应力、晶粒尺寸等力学性质影响因素后,进一步确认了HENs薄膜晶格畸变度与力学性质之间的直接关系。本研究寻找到一条简洁的晶格畸变度调控策略,为调节、优化氮化物薄膜性能,进而更好地解决复杂服役环境下防护薄膜的机械损伤问题提供了新的思路。High-entropy transition metal nitrides(HENs) are renowned for their thermal stability,corrosion and oxidation resistance,and exceptional mechanical properties,endowing them suitable for use as surface protection films for structural and moving components.However,mapping relationship between broadly adjustable metal components and mechanical properties of HENs is quite complex due to their diversity of HENs components.Taking(NbMoTaW)N_(x) thin film as the research object,this study prepared(NbMoTaW)N_(x)(x=0,0.59,0.80,0.95) thin films with different nitrogen contents by regulating nitrogen flow velocity during the film growth process based on the magnetron sputtering technique.Following analysis of(NbMoTaW)N_(x) thin films' composition,structure,morphology,and performance,the primary influence mechanism that govern their mechanical properties were explored.The findings revealed that by manipulating nitrogen vacancy,coordinated regulation over the lattice distortions of the nitrogen and metal sublattices was achieved.Due to high degree of the nitrogen and metal sublattice distortions,the(NbMoTaW)N_(0.80) sample demonstrated the highest hardness and best wear resistance performance.After excluding factors such as electronic structure,residual stress,and grain size that affect mechanical properties,a direct relationship between lattice distortions and mechanical properties of HENs films was confirmed.In summary,this research has unearthed a straightforward strategy for controlling the lattice distortions,offering a novel approach to adjust and optimize the performance of nitride films,and ultimately providing a more effective solution to address the mechanical damage issues that arise in the context of complex service environments.

关 键 词：晶格畸变度 氮空位 力学性质 高熵过渡金属氮化物 耐磨损性 

分 类 号：TQ174[化学工程—陶瓷工业]