高品级氮化铝粉体及其碳热还原氮化工艺研究进展  

Research progress on high grade aluminum nitride powder and its carbothermal reduction-nitridation preparation

作　　者：秦运璞 张智睿 赵勇智 王永 刘鸾 张一铭 徐海峰 吉晓霞 张泽鹏 王月隆 何庆 鲁慧峰 张德印 吴昊阳 浦恩祥 贾宝瑞 曲选辉 秦明礼[1,4] QIN Yunpu;ZHANG Zhirui;ZHAO Yongzhi;WANG Yong;LIU Luan;ZHANG Yiming;XU Haifeng;JI Xiaoxia;ZHANG Zepeng;WANG Yuelong;HE Qing;LU Huifeng;ZHANG Deyin;WU Haoyang;PU Enxiang;JIA Baorui;QU Xuanhui;QIN Mingli(Institute for Advanced Materials and Technology,University of Science and Technology Beijing,Beijing 100083,China;Xiamen Juci Technology Co.,Ltd.,Xiamen 361100,China;Kunming Institute of Physics,Kunming 650000,China;Beijing Advanced Innovation Center for Materials Genome Engineering,University of Science and Technology Beijing,Beijing100083,China)

机构地区：[1]北京科技大学新材料技术研究院,北京100083 [2]厦门钜瓷科技有限公司,厦门361100 [3]昆明物理研究所,昆明650000 [4]北京科技大学北京材料基因工程高精尖创新中心,北京100083

出　　处：《粉末冶金技术》2024年第3期215-225,共11页Powder Metallurgy Technology

基　　金：国家自然科学基金资助项目(51774035);河北省省级科技计划资助项目(20311001D)。

摘　　要：氮化铝(AlN)具有高导热、绝缘、低膨胀、无磁等优异性能,是半导体、电真空等领域高端装备的关键材料,特别是在航空航天、轨道交通、新能源装备、高功率LED、5G通讯、电力传输、工业控制等领域功率器件中具有不可取代的作用。高品级粉体是制备高性能陶瓷的基础,氮化铝粉体的性质直接影响了后续成形、烧结等工艺以及材料的组织和性能。碳热还原氮化法制备氮化铝粉体具有纯度高、粒度细和烧结性好等特点,本文综述了氮化铝粉末的评价指标以及碳热还原氮化法制备氮化铝粉末的研究进展,提出未来研究与产业化的方向与趋势。Aluminum nitride(AlN)has high thermal conductivity,good insulation,low thermal expansion coefficient,non-magnetic,and other excellent properties used as a key material for high-end equipment in semiconductor,electric vacuum,and other fields.Especially in aerospace,rail transportation,new energy equipment,high-power LED,5G communication,power transmission,industrial control,and other fields of power devices,AlN has an irreplaceable role.The high-grade powders are the basis for the preparation of high-performance ceramics.The properties of AlN powders directly affect the forming,sintering,microstructure,and performance of the AlN ceramics.Carbothermal reduction-nitridation method is a promising method to produce the AlN powders with high purity,fine particle size,and high sintering property.The evaluation indexes of the AlN powders and the research progress on the carbothermal reduction-nitridation of AlN powders were reviewed in this paper,and the direction and trend of future research and industrialization were proposed.

关 键 词：氮化铝 碳热还原氮化法 粉体制备 粉末指标 

分 类 号：TF123[冶金工程—粉末冶金] TG142.71[冶金工程—冶金物理化学]