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作 者:侯自如 王哲飞 武永 HOU Ziru;WANG Zhefei;WU Yong(School of Electronics and Information Engineering,Nanjing University of Information Science and Technology,Nanjing 210044,China;College of Electronic and Information Engineering,Nanjing University of Aeronautics and Astronautics,Nanjing 211106,China)
机构地区:[1]南京信息工程大学电子与信息工程学院,南京210044 [2]南京航空航天大学电子信息工程学院,南京211106
出 处:《激光技术》2024年第3期345-351,共7页Laser Technology
基 金:江苏省大学生创新创业训练计划资助项目(202310300079Y)。
摘 要:为了实现对甲烷体积分数的高精度检测,采用多层结构激发了具有高品质因素的光子自旋霍尔效应现象。利用非对称的排列方式,将甲烷敏感膜引入结构中,通过敏感膜的折射率变化,实现对甲烷体积分数的检测;研究了气体孔隙率、周期数、金属厚度和敏感膜厚度对光子自旋霍尔效应的影响,并采用传输矩阵法进行了数值分析。结果表明,该传感器可对体积分数为0~3%、折射率变化为1.4364~1.4478的甲烷气体进行检测,灵敏度为29.6°,最高质量因素和最低检测下限分别为395和0.00012。该传感器结构简单、检测能力强,为光学传感器的研究提供了新思路。In order to realize the high precision detection of the volume fraction of methane,the photonic spin Hall effect phenomenon with high-quality factor is excited by a multilayer structure.In an asymmetric arrangement,a methane-sensitive film was introduced into the structure,and the volume fraction of methane could be detected by the change in the refractive index of the sensitive film.The effects of gas porosity,period number,metal thickness,and sensitive film thickness on the photon spin Hall effect were studied,and the transfer matrix method was used for numerical analysis.The results show that the sensor can detect methane gas with volume fraction of 0~3%(refractive index change is 1.4364~1.4478)with a sensitivity of 29.6°.The highest figure of merit and the lowest detection limit are 395 and 0.00012,respectively.The sensor has a simple structure and strong detection ability,which provides a new idea for the research of optical sensors.
关 键 词:传感器技术 甲烷体积分数 甲烷敏感膜 非互易 光子自旋霍尔效应
分 类 号:TP212[自动化与计算机技术—检测技术与自动化装置]
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