检测多种VOCs的高选择性MEMS气体传感器阵列构建与优化  

Optimization of highly selective MEMS gas sensor arrays for detection of multiple VOCs

作　　者：刘潇繁 姚龙超 胡艳[3] 郑成航[1,2] 杨健 陈玲红 高翔[1,2] LIU Xiaofan;YAO Longchao;HU Yan;ZHENG Chenghang;YANG Jian;CHEN Linghong;GAO Xiang(State Key Laboratory of Clean Energy Utilization Zhejiang University,Hangzhou 310027,China;State Environment Protection Engineering Center for Coal-Fired Air Pollution Control,Hangzhou 310027,China;Ningbo Innovation Center,Zhejiang University,Ningbo 315100,China)

机构地区：[1]浙江大学能源清洁利用国家重点实验室,浙江杭州310027 [2]国家环境保护燃煤大气污染物控制工程技术中心,浙江杭州310027 [3]浙江大学宁波科创中心,浙江宁波315100

出　　处：《能源工程》2024年第3期1-8,共8页Energy Engineering

基　　金：国家重点研发计划项目课题(2022YFC3702001);浙江省重点研发计划项目(2021C03165);国家自然科学基金项目(52075487)。

摘　　要：针对挥发性有机化合物(volatile organic compounds,VOCs)快速准确检测与识别需求,首先制备了贵金属Pt、Ru和Pd负载的SnO2纳米颗粒,以及稀土元素Ce掺杂的In2O3纳米结构等四种高性能的气敏材料。基于微电子机械系统(micro-electro-mechanical system,MEMS)微热板,通过点胶法组装成微型化、低功耗的气体传感器,并构建材料和工作温度不同的多通道气体传感器阵列。然后对甲苯、丙酮、甲醇、乙酸乙酯和乙醇五种VOCs气体进行了气敏特性测试,采用Wilks’Λ统计量方法对传感器进行特征选择和阵列优化。对比了不同传感器组合时线性判别分析(linear discrimination analysis,LDA)对气体种类的识别效果,最后确定材料、温度优化的11个传感器形成最优阵列,作为判别指标的轮廓系数从0.597提升至0.965,对5种气体的识别能力显著提高。本文基于材料和温度对气敏选择性的影响,构建多通道MEMS传感器阵列,为实际应用中多种VOCs的检测与识别提供了依据与支撑。For the rapid and accurate detection and identification of volatile organic compounds(VOCs),four high-performance gas-sensitive materials by chemical modification,namely SnO2 nanoparticles loaded with precious metals Pt,Ru and Pd,and In2O3 nanostructures doped with rare earth elements Ce were prepared.Based on micro hotplates fabricated with micro-electro-mechanical system(MEMS)technique,miniaturized and low-power gas sensors were assembled by the dispensing method,and multi-channel gas sensor arrays with different materials and operating temperatures were constructed.Then the gas-sensing characteristics of five VOCs,including toluene,acetone,methanol,ethyl acetate,and ethanol were tested,and the Wilks'Λstatistic method was used for feature selection and array optimization.The results of linear discrimination analysis(LDA)for gas discrimination with different sensor combinations were compared,and finally 11 sensors with optimized materials and temperatures were identified to form the sensor array,and the silhouette coefficient as a discrimination index increased from 0.597 to 0.965,which significantly improved the recognition ability towards the five gases.A multi-channel MEMS sensor array based on the effects of material and temperature on gas-sensing selectivity is contructed,which provides a basis and support for the detection and identification of multiple VOCs in practical applications.

关 键 词：VOCs检测 气体传感器 温度控制 阵列优化 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]