氢气中微量与痕量硅烷的色谱法检测  

Determination of Trace and Trace Silane in Hydrogen by Chromatography

作　　者：耿全荣 姜硕 韩维炜 牛云华 刘亚军 梅世尧 罗永强 GENG Quanrong;JIANG Shuo;HAN Weiwei;NIU Yunhua;LIU Yajun;MEI Shiyao;LUO Yongqiang(Leshan GCL New Energy Technology Co.,Ltd.,Leshan 614800,China;Jiangsu Zhongneng Silicon Technology Development Co.,Ltd.,Xuzhou 221122,China)

机构地区：[1]乐山协鑫新能源科技有限公司,四川乐山614800 [2]江苏中能硅业科技发展有限公司,江苏徐州221122

出　　处：《低温与特气》2024年第3期46-48,共3页Low Temperature and Specialty Gases

基　　金：2022年乐山市科技项目(22ZDYJ0120);乐山协鑫新能源科技有限公司研发项目“硅烷在线监测技术的开发与应用(研发[2022]-01号)”。

摘　　要：描述了使用氦离子化气相色谱仪分析氢气中微量及痕量硅烷的原理及方法,统计了该方法的精密度与准确度,对分析结果进行验证并探讨了影响因素。The principle and method for the analysis of trace and trace silane in hydrogen by helium ionized gas chromatograph are described.The precision and accuracy of the method are calculated.The analysis results were verified and the influencing factors were discussed.

关 键 词：硅烷 氦离子 气相色谱 

分 类 号：O659[理学—分析化学] O657.7[理学—化学]