高分辨率罗兰圆光学系统的色差校正方法研究  

Research on Chromatic Aberration Correction Method for High-Resolution Roland Circle Optical System

作　　者：陈吉文 陈作儿 CHEN Ji-wen;CHEN Zuo-er(School of Electrical and Control Engineering,North China University of Technology,Beijing 100144,China)

机构地区：[1]北方工业大学电气与控制工程学院,北京100144

出　　处：《光谱学与光谱分析》2024年第7期2011-2017,共7页Spectroscopy and Spectral Analysis

基　　金：科技部重点研发计划项目(2021YFF0700102)资助。

摘　　要：罗兰圆光学系统优点众多,但系统中因平凸透镜的使用,导致各特征波长色散后的成像点在罗兰圆附近产生了一定量的偏移量,使得各波长成像点依次排列在一条曲面上。由于目前新型采集器件线阵CMOS或CCD的使用,而这类传感器的感光面是一个平面,因此导致结果产生较严重的色差。提出了一种使用加权最小二乘法拟合像面的色差校正方法,并计算出系统像面的中心偏移距和偏移倾斜角这两个校正参数,将其引入原本罗兰圆光学系统进行色差校正,从而确定线阵光电传感器像面的最佳位置,实现高分辨率。此外在真空紫外光谱中C、P和S等元素非常重要,可使用本文提出的基于加权最小二乘法的色差校正方法,通过增加这类元素权值占比,实现最优分辨率。最后通过Zemax软件进行光学仿真,完成了罗兰圆光学系统的仿真以及优化。并给出170~410 nm波段点列图的成像宽度仿真以及各元素特征波长在CMOS传感器上所采集到的光谱图,推算出其实际应用中的分辨率,其照度光谱图显示其分辨率均可保持在0.02 nm,接近系统理论最佳分辨率。研究结果表明基于加权最小二乘法拟合像面的方法,可实现罗兰圆光学系统的色差校正,实现高分辨率。The Roland circle optical system has many advantages.Still,due to using a planoconvex lens in the system,the imaging points that have undergone dispersion also generate a certain amount of offset distance near the Roland circle,resulting in the imaging points of each characteristic wavelength arranged sequentially on a curved surface.Due to the current use of new collection devices such as linear array CMOS or CCD,where the photosensitive area of these sensors is a flat surface,serious chromatic aberration is caused in the results.This article proposes a chromatic aberration correction method using the weighted least squares method to fit the image plane and calculate the two correction parameters of the center offset distance and offset tilt angle of the system image plane.Based on the original Roland circle optical system,these two correction parameters are introduced for chromatic aberration correction,thereby determining the optimal position of the linear array photoelectric sensor image plane and achieving high resolution.In addition,elements such as C,P,and S are very important in the VUV spectrum.The chromatic aberration correction method based on weighted least squares proposed in this article can achieve optimal resolution by increasing the weight proportion of characteristic wavelengths of such elements.Finally,optical simulation was conducted using Zemax software to complete the simulation and optimization of the Roland circle optical system.The imaging width simulation of spot diagrams in the 170~410 nm wavelength range and the spectral images of each element's characteristic wavelengths collected on CMOS sensors were provided.The resolution in practical applications was calculated,and the illuminance spectral images showed that their resolution could be maintained at 0.02 nm,close to the optimal theoretical resolution of the system.The research results of this article indicate that using the weighted least squares method to fit the image plane can achieve chromatic aberration correction for Roland ci

关 键 词：罗兰圆光学系统 平凸透镜 色差校正 高分辨率 加权最小二乘法 

分 类 号：TH744[机械工程—光学工程]