基于分形理论的旋转超声磨削Si_(3)N_(4)陶瓷表面微观形貌  

Surface micromorphology of Si_(3)N_(4) ceramic by rotating ultrasonic grinding based on fractal theory

作　　者：孙永国[1] 王伟[1] 李文知 魏恒举 魏士亮 SUN Yongguo;WANG Wei;LI Wenzhi;WEI Hengju;WEI Shiliang(National and Local Joint Engineering Laboratory of High Efficiency Cutting and Tool,Harbin University of Science and Technology,Harbin 150080,China)

机构地区：[1]哈尔滨理工大学,高效切削及刀具国家地方联合工程实验室,哈尔滨150080

出　　处：《金刚石与磨料磨具工程》2024年第3期382-390,共9页Diamond & Abrasives Engineering

基　　金：黑龙江省普通本科高等学校青年创新人才培养计划“石英陶瓷超声磨-抛复合加工表面形貌收敛关键技术研究”(UNPYSCT-2020195)。

摘　　要：为了研究旋转超声磨削Si_(3)N_(4)陶瓷表面的微观形貌,基于分形理论研究不同加工参数下Si_(3)N_(4)陶瓷表面微观形貌的变化。设计旋转超声磨削Si_(3)N_(4)陶瓷正交试验,对比分析不同加工参数对Si_(3)N_(4)陶瓷表面分形维数和多重分形谱的影响,并设计单因素试验研究不同加工参数下Si_(3)N_(4)陶瓷表面的粗糙度、分形维数和多重分形谱。结果表明:旋转超声磨削Si_(3)N_(4)陶瓷表面时,分形维数能更好地表征其加工表面的缺陷状态,多重分形谱则能更好地表征其加工表面缺陷的起伏程度变化。To study the surface morphology of Si_(3)N_(4) ceramics using rotary ultrasonic grinding,changes in the surface morphology under different machining parameters were analyzed based on fractal theory.Orthogonal experiments were designed to compare and analyze the effects of various processing parameters on the fractal dimensions and multifractal spectra of the Si_(3)N_(4) ceramic surface.Additionally,single-factor experiments were conducted to study the roughness,fractal dimensions,and multifractal spectra of the Si_(3)N_(4) ceramic surface under different processing parameters.The results show that fractal dimensions can effectively characterize the defect state of the processed surface of Si_(3)N_(4) ceramics during rotary ultrasonic grinding,while multifractal spectra can better represent the degree of fluctuation in surface defects.

关 键 词：旋转超声磨削 Si_(3)N_(4)陶瓷 分形维数 多重分形谱 微观形貌 

分 类 号：TG58[金属学及工艺—金属切削加工及机床] TG74