Design,simulation,and testing of a tunable MEMS multi-threshold inertial switch  

作　　者：Qiu Xu Rodrigo T.Rocha Yousef Algoos Eric Feron Mohammad I.Younis 

机构地区：[1]Faculty of Electronic Information Engineering,Huaiyin Institute of Technology,Huai’an,223003,PR China [2]Computer,Electrical and Mathematical Science and Engineering Division,King Abdullah University of Science and Technology,Thuwal,23955-6900,Saudi Arabia [3]Piezoelectric Microsystem Technologies,Silicon Austria Labs,Villach,9524,Austria [4]Physical Sciences and Engineering Division,King Abdullah University of Science and Technology,Thuwal,23955,Saudi Arabia [5]Mechanical Engineering Department,State University of New York,Binghamton,NY,13902,USA

出　　处：《Microsystems & Nanoengineering》2024年第2期37-46,共10页微系统与纳米工程（英文）

基　　金：supported by King Abdullah University of Science and Technology(KAUST).

摘　　要：This paper presents a tunable multi-threshold micro-electromechanical inertial switch with adjustable threshold capability.The demonstrated device combines the advantages of accelerometers in providing quantitative acceleration measurements and g-threshold switches in saving power when in the inactive state upon experiencing acceleration below the thresholds.The designed proof-of-concept device with two thresholds consists of a cantilever microbeam and two stationary electrodes placed at different positions in the sensing direction.The adjustable threshold capability and the effect of the shock duration on the threshold acceleration are analytically investigated using a nonlinear beam model.Results are shown for the relationships among the applied bias voltage,the duration of shock impact,and the tunable threshold.The fabricated prototypes are tested using a shock-table system.The analytical results agree with the experimental results.The designed device concept is very promising for the classification of the shock and impact loads in transportation and healthcare applications.

关 键 词：TUNABLE ACCELERATION TESTING 

分 类 号：TN86[电子电信—信息与通信工程]