A toroidal SAW gyroscope with focused IDTs for sensitivity enhancement  

作　　者：Lu Tian Haitao Zhao Qiang Shen Honglong Chang 

机构地区：[1]Ministry of Education Key Laboratory of Micro and Nano Systems for Aerospace,School of Mechanical Engineering,Northwestern Polytechnical University,Xi’an,710072,China

出　　处：《Microsystems & Nanoengineering》2024年第2期47-56,共10页微系统与纳米工程（英文）

基　　金：supported by the Natural Science Basic Research Plan in Shaanxi Province of China(Program No.2023JC-XJ-07);the National Key Research and Development Program of China(No.2018YFB2002602);the National Natural Science Foundation of China(No.52375577 and No.52075454).

摘　　要：A surface acoustic wave(SAW)gyroscope measures the rate of rotational angular velocity by exploiting a phenomenon known as the SAW gyroscope effect.Such a gyroscope is a great candidate for application in harsh environments because of the simplification of the suspension vibration mechanism necessary for traditional microelectromechanical system(MEMS)gyroscopes.Here,for the first time,we propose a novel toroidal standing-wave-mode SAW gyroscope using focused interdigitated transducers(FIDTs).Unlike traditional SAW gyroscopes that use linear IDTs to generate surface acoustic waves,which cause beam deflection and result in energy dissipation,this study uses FIDTs to concentrate the SAW energy based on structural features,resulting in better focusing performance and increased SAW amplitude.The experimental results reveal that the sensitivity of the structure is 1.51µV/(°/s),and the bias instability is 0.77°/s,which are improved by an order of magnitude compared to those of a traditional SAW gyroscope.Thus,the FIDT component can enhance the performance of the SAW gyroscope,demonstrating its superiority for angular velocity measurements.This work provides new insights into improving the sensitivity and performance of SAW gyroscopes.

关 键 词：ANGULAR DEFLECTION GYROSCOPE 

分 类 号：O57[理学—粒子物理与原子核物理]