Simultaneous detection of the shuttling motion of liquid metal droplets in channels under alternating pressure and capacitive sensor signals  

作　　者：Shinji Bono Ryotaro Nakai Satoshi Konishi 

机构地区：[1]Research Organization of Science and Technology,Ritsumeikan University,Shiga,Japan [2]Ritsumeikan Advanced Research Academy,Kyoto,Japan [3]Ritsumeikan Global Innovation Research Organization,Ritsumeikan University,Shiga,Japan [4]Graduate School of Science and Engineering,Ritsumeikan University,Shiga,Japan

出　　处：《Microsystems & Nanoengineering》2024年第2期83-90,共8页微系统与纳米工程（英文）

基　　金：supported by the Ritsumeikan Advanced Research Academy and the Ritsumeikan Global Innovation Research Organization.

摘　　要：Implementing a signal-switching mechanism for the selective use of integrated sensors and actuators plays a crucial role in streamlining the functionality of miniaturized devices.Here,a liquid metal droplet(LMD)-based signal-switching mechanism is introduced to achieve such functionality.Pressure modulation with a 100-μm spatial resolution enabled precise control of the position of the LMDs within a channel.After integrating the channel with asymmetrically structured electrodes,the effect of the shuttle-like movement of LMD on the temporal changes in the overall capacitance was investigated.Consequently,analysis of the capacitive peaks revealed the directional movement of the LMDs,enabling estimation of the position of the LMDs without direct observation.In addition,we achieved successful signal extraction from the capacitive sensor that was linked to the activated electrodes,thereby enabling selective data retrieval.The proposed signal-switching mechanism method achieved a detection accuracy of~0.1 pF.The sensor’s ability to simultaneously detect the LMD position and generate a signal underscores its significant potential for multiplexing in multisensing systems,particularly in concealed environments,such as in vivo settings.

关 键 词：LIQUID thereby integrating 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]