Cavity-agnostic acoustofluidic manipulations enabled by guided flexural waves on a membrane acoustic waveguide actuator  

作　　者：Philippe Vachon Srinivas Merugu Jaibir Sharma Amit Lal Eldwin J.Ng Yul Koh Joshua E.-Y.Lee Chengkuo Lee 

机构地区：[1]Department of Electrical and Computer Engineering,National University of Singapore,Singapore,Singapore [2]Institute of Microelectronics,Agency for Science,Technology and Research(A*STAR),Singapore,Singapore [3]SonicMEMS Laboratory,School of Electrical and Computer Engineering,Cornell University,Ithaca,NY,USA [4]School of Electrical and Data Engineering,University of Technology Sydney,Ultimo,NSW,Australia

出　　处：《Microsystems & Nanoengineering》2024年第2期153-171,共19页微系统与纳米工程（英文）

基　　金：supported by A*STAR under the“Nanosystems at the Edge”programme(Grant No.A18A4b0055).

摘　　要：This article presents an in-depth exploration of the acoustofluidic capabilities of guided flexural waves(GFWs)generated by a membrane acoustic waveguide actuator(MAWA).By harnessing the potential of GFWs,cavity-agnostic advanced particle manipulation functions are achieved,unlocking new avenues for microfluidic systems and lab-on-a-chip development.The localized acoustofluidic effects of GFWs arising from the evanescent nature of the acoustic fields they induce inside a liquid medium are numerically investigated to highlight their unique and promising characteristics.Unlike traditional acoustofluidic technologies,the GFWs propagating on the MAWA’s membrane waveguide allow for cavity-agnostic particle manipulation,irrespective of the resonant properties of the fluidic chamber.Moreover,the acoustofluidic functions enabled by the device depend on the flexural mode populating the active region of the membrane waveguide.Experimental demonstrations using two types of particles include in-sessile-droplet particle transport,mixing,and spatial separation based on particle diameter,along with streaming-induced counter-flow virtual channel generation in microfluidic PDMS channels.These experiments emphasize the versatility and potential applications of the MAWA as a microfluidic platform targeted at lab-on-a-chip development and showcase the MAWA’s compatibility with existing microfluidic systems.

关 键 词：WAVEGUIDE fluid CAVITY 

分 类 号：O422[理学—声学]